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http://dx.doi.org/10.3795/KSME-A.2003.27.8.1266

A Magnetic Microsensor based on the Hall Effect in an AC Microplasma  

Seo, Young-Ho (한국과학기술원 디지털나노구동연구단)
Han, Ki-Ho (한국과학기술원 디지털나노구동연구단)
Cho, Young-Ho (한국과학기술원 디지털나노구동연구단)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.27, no.8, 2003 , pp. 1266-1272 More about this Journal
Abstract
This paper presents a new class of magnetic microsensors based on the Hall effect in AC microplasma. In the theoretical study, we develop a simple model of the plasma Hall sensor and express the plasma Hall voltage as a function of magnetic field, plasma discharge field, pressure, and electrode geometry. On this basis, we have designed and fabricated magnetic microsensors using AC neon plasma. In the experiment, we have measured the Hall voltage output of the plasma microsensors for varying five different conditions, including the frequency and the magnitude of magnetic field, the frequency and the magnitude of plasma discharge voltage, and the neon pressure. The fabricated magnetic microsensors show a magnetic field sensitivity of 8.87${\pm}$0.18㎷/G with 4.48% nonlinearity.
Keywords
Plasma Hall Effect; Magnetic Sensor; AC Neon Plasma; Microsensor Packaging;
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  • Reference
1 Lenz, J.E., 1990, 'A Review of Magnetic Sensors,' Proc. of IEEE, Vol. 78, No. 6, pp. 973-989   DOI   ScienceOn
2 Franklin, R.N., 1976, Plasma Phenomena in Gas Discharge, Oxford University Press
3 Meek, J.M., Graggs, J.D., 1953, Electrical Breakdown of Gases, Clarendon Press, Oxford
4 Shim, D.S., 1998, Discharge Mechanism in a Micro Capacitive Discharge Cell, Master Thesis, KAIST
5 Sugiyama, Y., Itoii, J. and Kanemaru, S., 1993, 'Vacuum Magnetic Sensor with Comb- Shaped Field Emitter Arrays,' Tech, Digest of Transducers'93, pp. 884-887
6 Lichtenberg, L.A. and Allan, J., Principles of plasma discharges and materials processing, Wiley, 1994