• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.153-159
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• 1997

A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH$_{3}$OH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.606-608
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• 1995

A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by external nitrogen pressure and the mercury-contact was moved by actuation pressure of 110torr in the 100${\mu}m$ wide microchannel. The Injection pressure of mercury was 300torr in the 60${\mu}m$ wide microchannel of the micro relay structure.

• Journal of Energy Engineering
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• v.10 no.2
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• pp.105-113
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• 2001

지구환경문제와 에너지문제를 해소하는 한 방법으로서 Vuilleumier 사이클 기관(VM)을 이용한 공조기형 열구동형 히트펌프시스템(VMHP)이 각광을 받고 있다. VMHP의 제작에 있어서는 VM의 각 부분의 이론적 검토 및 최적설계를 위한 해석프로그램의 개발이 필수적이고 최적설계를 위한 설계 기본서의 도출 및 설계자료의 확보가 필요하다. VMHP의 상세한 성능해석이나 설계에 활용 가능한 성능해석프로그램을 개발하였다. 해석은 VM의 시스템의 각 부분을 11개 부분으로 나누어 단열모델해석으로 수행하였다. 열교환기에서의 열전달 성능과 재생기손실, 열전도손실, 셔틀손실, 유동에 의한 압력손실과 열압축측과 열펌프측 사이의 마찰손실, 피스턴실 및 로드실의 마찰손실을 고려한 해석을 수행하였다. 해석에 의한 계산치의 정확성을 본 해석결과를 이용하여 제작한 시험기에 의해 비교하였다. 계산치와 시험기에 의한 전체성능을 비교하였고 또한 각각의 손실에서 고유한 파라미터를 추출하여 그 파라미터의 변화에 따른 열손실 전체의 변화 정도를 파악하여 실험치와 계산치의 정상적인 비교로부터 성능해석의 정도를 비교하였다. 비교결과에 의해 난방능력은 8%, 냉방능력은 19%의 최대오차로서 본 해석결과가 VMHP의 설계를 위해 유용한 수단으로 사용될 수 있음을 확인하였다.

• Applied Chemistry for Engineering
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• v.7 no.6
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• pp.1181-1191
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• 1996

To develope chemical heat pump, which is operated by heat of high temperature using available energy sources such as solar heat and many kinds of waste thermal energy we have studied theoretically the enhancement effects of inserted fins on the rate of heat transfer and reaction in cylinderical $Ca(OH)_2$ packed bed reactor. The results obtained by numerical analysis about profiles of temperature, completion time of reaction and exothermic heat amount released from the reactor read as the inserted copper fins in reator reduce the completion time of dehydration reaction in packed bed by half, and the rate of thermochemical reaction depends on the temperature and concentration, and it is also governed by the boundary conditions and the rate of heat transfer in the particle packed bed.