한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제14권9호
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- Pages.68-79
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- 1997
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
컴플라이언스를 갖는 웨이퍼 탐침 시스템용 미동 매니퓰레이터
A Fine Manipulator with Compliance for Wafer Probing System
- 최기봉 (한국과학기술원 기계공학과) ;
- 김수현 (한국과학기술원 기계공학과) ;
- 곽윤근 (한국과학기술원 기계공학과)
- Choi, Kee-Bong ;
- Kim, Soo-Hyun ;
- Kwak, Yoon Keun
- 발행 : 1997.09.01
초록
A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-
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