• Journal of the Korean Society for Precision Engineering
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• v.14 no.9
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• pp.68-79
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• 1997

A six DOF fine manipulator based on magnetic levitation is developed. Since most of magnetic levitation system are inherently unstable, a proposed magnetically levitated fine manipulator is implemented by use of an antagonistic structure to increase stability. From mathematical modeling and experiment, the equations of motion are derived. In addition, a six DOF sensing system is implemented by use of three 2-axis PSD sensors. A model reference-$H_{\infty}$ controller is applied to the system for the position control, In application of the fine manipulator, a wafer probing system is proposed to identify nonfunctional circuts. The probing system requires compliance to avoid destruction of DUT(device under test). A feedfor- ward-PD controllers are presented by the terms of the position accuracy, the settling time and the force accuracy.y.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.700-703
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• 1997

A robust controller for a 6 DOF magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts : a model reference controller (MRC) and a H$_{\infty}$ controller (HIC). First, the MRC stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the HIC minimizes errors generated from the MRC due to noise and disturbance since the HIC is a kind of robust controller. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion, it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller..

• Journal of the Korean Society for Precision Engineering
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• v.16 no.5 s.98
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• pp.58-65
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• 1999

A magnetic levitation system requires a robustness to overcome a dynamic instability due to disturbances. In this paper a robust controller for a magnetically levitated fine manipulator is presented. The proposed controller consists of following two parts: a model reference controller and an $H_{\infty}$ controller. First, the model reference control stabilizes the motion of the manipulator. Then, the motion of the manipulator follows that of the reference model. Second, the $H_{\infty}$ control minimizes errors generated from the model reference control due to noise and disturbance since the $H_{\infty}$ control is a kind of robust control. The experiments of position control and tracking control are carried out by use of the proposed controller under the conditions of free disturbances and forced disturbances. Also, the experiments using PID controller are carried out under the same conditions. The results from above two controllers are compared to investigate the control performances. As the results, it is observed that the proposed controller has similar position accuracy but better tracking performances comparing to the PID controller as well as good disturbance rejection effect due to the robust characteristics of the controller. In conclusion. it is verified that the proposed controller has the simple control structure, the good tracking performances and good disturbance rejection effect due to the robust characteristics of the controller.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.30B no.6
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• pp.9-19
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• 1993

This paper presents a new concept of a reconfigurable manipulator system which adjusts its mechanical structure to suit the kinematic characteristics of a given task. A highly redundant manipulator designed as a general purpose manipulator needs to be reconfigured for a specific task. A general task can be decomposed of motion and force components with different control requirements: either gross motion control or fine motion control. Each of these task components are distributed to each part of the manipulator based on the control requirements and the structure of the manipulator. Through the reconfiguration, a redundant manipulator is decomposed into two local arms, and the kinematic characteristics of each local arm is adjusted to suit the assigned task. The reconfigured redundant manipulator has two local arms well-configured for the local tasks and cooperating in serial for a given task. This globally enhances the performance of a redundant manipulator to execute a specific task. The simulation results are shown.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.22 no.10
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• pp.949-958
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• 2012

Position tracking control of a link of a slave manipulator which needed to track the corresponding link of a master manipulator was addressed in this paper. Since driving torque from motor is transmitted through a set of flexible cable to link, the motion control system is modeled by a two-mass model connected with elastic coupling which has finite stiffness. Relative vibration of two-mass resonant system is a serious problem to operate manipulator. This paper proposed sliding mode control to reduce resonant vibration and fine position tracking control. Also, a pseudo-sliding mode control which uses a saturation function instead of a signum function was discussed and showed that the pseudo-sliding mode control can improve disturbance regulation performance as well as guarantees fine command tracking without chattering which is an inherent drawback of basic sliding mode control. In addition, a disturbance observer based sliding mode control has been suggested to improve disturbance regulation performance. The feasibility of the proposed control design was verified along with some simulation results.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.6
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• pp.651-656
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• 2014

This paper presents a compensation method for an accelerometer to measure acceleration data accurately when a robot manipulator moves slowly. Although the accelerometer works fine under the fast movement of a robot manipulator, low cost accelerometers provide relatively inaccurate acceleration data under slow movements. In order to correct the error of the sensor data in the slow motion, correction factors are obtained experimentally. Then those corrected data are used for the disturbance observer. Experimental studies of the position control of a robot manipulator are conducted by applying the DOB (Disturbance Observer) control using corrected acceleration data.

• The Journal of Korean Institute for Practical Engineering Education
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• v.3 no.1
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• pp.193-199
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• 2011

In this paper, we propose a novel manipulator intended for the needs of telerobotic micromanipulation. We designed an original manipulator capable of performing fine motion with an accuracy greater than $2{\mu}m$, while remaining simple in design and easy in control. Preliminary calculations of manipulator accuracy have been conducted, and the device has been designed and manufactured accordingly. The accuracy of the proposed manipulator has been verified during the series micro-positioning experiments under different types of controllers, and the results proved that the manipulator is suitable for micromanipulation applications as a part of telerobotic system. The proposed manipulator has been compared to existing analogues by several parameters, and both its advantages and disadvantages have been discussed.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.463-463
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• 2000

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.

• Journal of IKEEE
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• v.3 no.2 s.5
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• pp.250-258
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• 1999

This paper presents a decentralized adaptive controller design for a Magnetically Levitated Fine Manipulator to follow the given trajectory as close as possible in spite of coupling effects between motion axes(degree of freedoms or subsystems). The present controller consists of two parts: the model reference controls based on known subsystems and the local adaptive controls. The former stabilizes the motion of the manipulator so as to follow that of the reference model. The latter reduces tracking errors due to coupling disturbances by adjusting the local gains to such levels that override interactions and assure the stability of the overall system. Through several experimental results, it has been shown that the decentralized adaptive control scheme has better tracking performances comparing to the PID controller case as well as good disturbance(coupling) rejection property.