E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제9권5호
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- Pages.506-511
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- 1996
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
플라즈마 파라메타 측정용 고속 langmuir프로브 구동회로 실현 및 적용
A study on fast langmuir probe driving circuit for measurement of plasma parameter and its application
초록
This paper deals with an inexpensive, simple and fast Langmuir probe sweeping circuit and its application. This sweeper completes a probe trace in a 1 ms order. Futhermore, the circuit drives a maximum probe voltage of