E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제9권5호
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- Pages.470-475
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- 1996
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
마이크로파 플라즈마 CVD법에 의한 섬유집합조직 다이아몬드막의 합성
Synthesis of fiber-textured diamond films by MWPECVD
초록
Fiber-textured diamond films have been deposited on scratched silicon(100) substrate by micro wave .plasma enhanced chemical vapor deposition at the condition of micro wave power : 950 W, pressure : 60 torr, H
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