Proceedings of the SAREK Conference (대한설비공학회:학술대회논문집)
- 2009.06a
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- Pages.1306-1311
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- 2009
Numerical Analysis on Energy Consumption of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms
반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지소비 수치해석
- Song, Gen-Soo (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
- Yoo, Kyung-Hoon (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH)) ;
- Kim, Hyoung-Tae (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology(KITECH))
- Published : 2009.06.25
Abstract
In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as
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