한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
- /
- Pages.156-156
- /
- 2008
Electrical properties of u/TaN/SiOC(-H)/p-Si(100) low-k dielectric stack
- Kim, Chang-Young (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Lee, Heang-Seuk (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Choi, Chi-Kyu (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
- 발행 : 2008.08.20