한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제35회 하계학술대회 초록집
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- Pages.155-155
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- 2008
Interface characterization and current conduction in low-k SiOC(-H) thin films
- Navamathavan, R. (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Kim, Chang-Young (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Lee, Heang-Seuk (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Lee, Heon-Ju (Department of Mechanical, Energy and Production Engineering Cheju National University) ;
- Choi, Chi-Kyu (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
- 발행 : 2008.08.20