대한설비공학회:학술대회논문집 (Proceedings of the SAREK Conference)
- 대한설비공학회 2008년도 하계학술발표대회 논문집
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- Pages.844-849
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- 2008
반도체 클린룸용 배기 열회수식 에어와셔의 에너지 소비량 성능평가 실험
An Experiment on Performance Evaluation of Energy Consumption of an Exhaust Air Heat Recovery Type Air Washer for Semiconductor Manufacturing Clean Rooms
- Song, Gen-Soo (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology) ;
- Yoo, Kyung-Hoon (Aerosol and Contamination Control Laboratory, Korea Institute of Industrial Technology) ;
- Shin, Dae-Kun (Research & Development Center, Daehan PNC) ;
- Son, Seung-Woo (Research & Development Center, Sunglim PS)
- 발행 : 2008.06.25
초록
In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as