Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.48-48
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- 2007
Preparation of p-type transparent conducting $CuGaO_2$ thin film by DC/RF sputtering
DC-RF 스퍼터링에 의한 p형 투명 전도성 $CuGaO_2$ 박막의 제조
- Park, Hyun-Jun (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Kwak, Chang-Gon (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
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Kim, Sei-Ki
(Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
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Ji, Mi-Jung
(Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
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Lee, Mi-Jae
(Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
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Choi, Byung-Hyun
(Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.)
- 박현준 (요업기술원 전자소재팀) ;
- 곽창곤 (요업기술원 전자소재팀) ;
-
김세기
(요업기술원 전자소재팀) ;
-
지미정
(요업기술원 전자소재팀) ;
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이미재
(요업기술원 전자소재팀) ;
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최병현
(요업기술원 전자소재팀)
- Published : 2007.06.21
Abstract
P-type transparent conducting