Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
- /
- Pages.48-48
- /
- 2007
Preparation of p-type transparent conducting $CuGaO_2$ thin film by DC/RF sputtering
DC-RF 스퍼터링에 의한 p형 투명 전도성 $CuGaO_2$ 박막의 제조
- Park, Hyun-Jun (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Kwak, Chang-Gon (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Kim, Sei-Ki (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Ji, Mi-Jung (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Lee, Mi-Jae (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.) ;
- Choi, Byung-Hyun (Korea Institute of Ceramic Engineering & Technology, Electronic materials lab.)
- 박현준 (요업기술원 전자소재팀) ;
- 곽창곤 (요업기술원 전자소재팀) ;
- 김세기 (요업기술원 전자소재팀) ;
- 지미정 (요업기술원 전자소재팀) ;
- 이미재 (요업기술원 전자소재팀) ;
- 최병현 (요업기술원 전자소재팀)
- Published : 2007.06.21
Abstract
P-type transparent conducting