한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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- Pages.47-47
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- 2007
저온화학기상증착에 의한 인듐산화막 구조에 관한 연구
Structural study of indium oxide thin films by metal organic chemical vapor deposition
- Pammi, S.Venkat.N. (Chungnam Univ.) ;
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Seong, Nak-Jin
(Chungnam Univ. BK21) ;
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Yoon, Soon-Gil
(Chungnam Univ. BK21)
- 발행 : 2007.06.21
초록
Indium oxide conducting films were dep9sited on Si(100) substrates at various temperatures by liquid delivery metal organic chemical vapor deposition using Indium (III) tris (2,2,6,6-tetramethyl-3.5-heptanedionato)