한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.184-185
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- 2006
열기상증착법을 이용한 3원계 MgZnO 나노구조의 합성
Synthesis of ternary ZnMgO nanostructures through thermal evaporation
- Kong, Bo-Hyun (Sungkyunkwan University, School of Advanced Materials Science & Engineering) ;
- Kim, Dong-Chan (Sungkyunkwan University, School of Advanced Materials Science & Engineering) ;
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Cho, Hyung-Koun
(Sungkyunkwan University, School of Advanced Materials Science & Engineering)
- 발행 : 2006.06.22
초록
Two-step growth to incorporate the Mg atoms in the ZnO nanorods fabricate by thermal evaporation process and also utilized the ZnO film as a template. In the first step of low temperature, Zn seed metals with low melting temperature formed the droplet, and then MgZnO ternary nanorods were grown by injecting oxygen and evaporating Mg atoms in high temperature process of the second step. The vertical growth of the MgZnO nanorods with large-area distribution and uniformity was successfully performed on the ZnO template. We investigated the shape of the vertically grown 1-D MgZnO nanorods and characterized the optical and crystal properties. We confirmed the incorporation of Mg atoms by the EDS and PL spectrum.