Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.1442-1445
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- 2005
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- 2005-8446(pISSN)
Improvement of Sensitivity to In-plane Strain/Deformation Measurement by Micro-ESPI Technique
마이크로 ESPI 기법에 의한 면내 변형 측정 민감도 향상
Abstract
Several test methods, including micro strain/deformation measurement techniques, have been studied to more reliably measure the micro properties in micro/nano materials. Therefore, in this study, the continuous measurement of in-plane tensile strain in micro-sized specimens of thin film materials was introduced using the micro-ESPI technique. TiN and Au thin films 1 and
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