편광분리 분산 분산형 백색광 간섭계를 이용한 박막두께형상측정법

Dispersive white-light interferometry using polarization of light for thin-film thickness profile measurement

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.