A Study on the Vibration Characteristics in Ultrasonic Levitation System according to the Circular Plate

원형 플레이트 형태에 따른 초음파 부상 장치의 진동특성에 관한 연구

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.