• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1527-1530
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.364-369
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitation various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system. The amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• Journal of ILASS-Korea
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• v.18 no.3
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• pp.126-131
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• 2013

This paper describes the effect of ultrasonic frequency(f) on the atomization and deformation characteristics of single water droplet in an acoustic levitation field. To achieve this, the ultrasonic levitator that can control sound pressure and velocity amplitude by changing frequency was installed, and visualization of single water droplet was conducted with high resolution ICCD and CCD camera. At the same time, atomization and deformation characteristics of single water droplet was studied in terms of normalized droplet diameter($d/d_0$), droplet diameter(d) variation and droplet volume(V) variation under different ultrasonic frequency(f) conditions. It was revealed that increase of ultrasonic frequency reduces the droplet diameter. Therefore, it is able to levitate with low sound pressure level. It also induces the wide oscillation range, large diameter and volume variation of water droplet. In conclusion, the increase of ultrasonic frequency(f) can enhance the atomization performance of single water droplet.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.264-268
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• 2005

In the semiconductor and optical industry the non-contact transportation is required for reducing the damages. The ultrasonic levitation is the solution of the problem. In this paper, the ultrasonic levitation system and 3 disk-type stator for levitating various object are proposed. The vibration modes of disks are analyzed with FEM and designed with the analysis results. The 3D vibration profiles of the disks are measured by Laser scanning vibrometer for verifying the vibration characteristics of the system and the amplitudes of the disks and the levitation heights of object are measured for evaluating the performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.959-962
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• 2005

In the semiconductor and optical industry. a new transport system which can replace the conventional transport system is required. The Transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required for reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system for levitation object are proposed. The 3D vibration profiles of the beam are measured by Laser Scanning Vibrometer for verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured fore evaluating the performance.

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.5
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• pp.590-599
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• 2003

In this study. object transport method based on ultrasonic flexural vibration is presented. Ultrasonic vibration generates ultrasonic traveling waves on the surface of elastic medium. Objects are transported through the interaction with traveling waves propagating in medium. Two types of transport methods are studied： frictional drive and acoustic levitation. With frictional drive, objects are transported in contact with the beam in the opposite direction of wave propagation whereas with acoustic levitation, objects are acoustically levitated above the beam surface and transported in the wave propagation direction. Transport characteristics are experimentally investigated using objects of different shapes and sizes. The transition from acoustic levitation mode to frictional drive mode is also examined. and it is found to occur when the ratio of mass to area of an object exceeds the threshold ratio of mass to area. It is envisaged that this feasibility study will serve as a stepping-stone for ultrasonic vibration to become an effective industrial material handling device in the future.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.415-418
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• 2005

In the semiconductor and optical industry, a new transport system which can replace the conventional transport systems is required. The transport systems are driven by the magnetic field and conveyer belts. The magnetic field may damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this semiconductor and optical industry, the non-contact system is required fur reducing the damages. The ultrasonic transportation is the solution of the problem. In this paper, the ultrasonic levitation system fur levitating object are proposed. The 3D vibration profiles of the beam are measured by Laser scanning Vibrometer fur verifying the vibration characteristics of the system and the amplitudes of the beam and the levitation heights of object are measured for evaluating the performance.

• The Journal of the Acoustical Society of Korea
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• v.37 no.6
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• pp.422-427
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• 2018

The purpose of this study is to investigate the effect of acoustic radiation force on the standing wave acoustic levitation phenomenon, which is the levitation of small objects near the pressure node of the standing wave, using the Bernoulli principle. The source and scheme of the acoustic radiation force, which is the cause of the levitation, are conceptually explained through comparison with the graph of the acoustic radiation force versus the distance from the transducer. A series of experiments supporting this explanation was performed with a BLT(Bolt-clamped Langevin Type) ultrasonic transducer to confirm that the objects are floating near the pressure nodes and that it satisfies the condition for the standing wave formation when the object is levitating. Furthermore, the vertical alignment of floating objects, which is a characteristic of standing wave acoustic levitation phenomenon, could be explained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.331-332
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• 2006

Transport systems which are the important part of the factory automation have much influence on improving productivity. Object transport systems are driven typically by the magnetic field and conveyer belt. In recent years, as the transmission and processing of information is required more quickly, demands of optical elements and semiconductors increase. However, conventional transport systems are not adequate for transportation of those. The reason is that conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. Vibration modes of each flexural beam are verified by using Laser Scanning Vibrometer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.1241-1246
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• 2007

In recent years, the semiconductor industry and the optical industry are developed rapidly. The recent demands have expanded for optical components such as the optical lens, the optical semiconductor and the measuring instrument. Object transport systems are driven typically by the magnetic field and the conveyer belt. Recent industry requires more faster and efficient transport system. However, conventional transport systems are not adequate for transportation of optical elements and semiconductors. The conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. The steady state flexural vibration of the beam is expressed using Euler-Bernoulli beam theory. The transport direction of an object is examined according to phase difference and frequency. The theoretical results are verified by experiments.