한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2004년도 추계학술대회 논문집
- /
- Pages.609-613
- /
- 2004
- /
- 2005-8446(pISSN)
반도체용 대구경관의 전해 복합연마에 대한 초정밀 가공 특성연구
A Study on the characteristics of ultra precision about Buffing and Electropolishing for Semiconductor Large Radius Pipe
초록
On this study, electrochemical polishing is adapted to ultra-fine surface for semiconductor large radius gas-tube. The system which buffing and electrochemical polishing can be performed simultaneously was constructed in connection with developing exclusive system. Based on existing papers and the research of background, electrode gap and electrolyte flow were fixed. Current density and electrochemical precision time were chosen as variables. On this study, it is objected to find optimal precision condition and precision variables on the in-process electrochemical polishing.
키워드