• Title/Summary/Keyword: 복합전해연마

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A Study on the characteristics of ultra precision about Buffing and Electropolishing for Semiconductor Large Radius Pipe (반도체용 대구경관의 전해 복합연마에 대한 초정밀 가공 특성연구)

  • 이정훈;이은상
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.609-613
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    • 2004
  • On this study, electrochemical polishing is adapted to ultra-fine surface for semiconductor large radius gas-tube. The system which buffing and electrochemical polishing can be performed simultaneously was constructed in connection with developing exclusive system. Based on existing papers and the research of background, electrode gap and electrolyte flow were fixed. Current density and electrochemical precision time were chosen as variables. On this study, it is objected to find optimal precision condition and precision variables on the in-process electrochemical polishing.

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Characteristic of EP-MAP for Deburring of Microgroove using EP-MAP (전해-자기 복합 가공을 이용한 미세 그루브형상의 가공 특성에 관한 연구)

  • Kim, Sang Oh;Son, Chul Bae;Kwak, Jae Seob
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.3
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    • pp.313-318
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    • 2013
  • Magnetic abrasive polishing is an advanced deburring process for nonmagnetic materials and micropattern products that have non-machinability characteristics. Despite these advantages, there are some problems with using MAP for deburring. MAP has introduced geometric errors into microgrooves because of an over-cutting force caused by uncontrolled magnetic abrasives in the MAP tool. Thus, in this study, to solve this problem, an EP (electrolyte polishing)-MAP hybrid polishing process was developed for deburring microgrooves in an STS316 material. In addition, an evaluation of EP-MAP for the deburring of microgrooves was carried out by profiling the burrs. The results of the experiment showed geometric errors after the deburring process using MAP. However, in the case of EP-MAP, no geometric error was observed after the process because of the lower material removal rate in EP-MAP.

Study on Characteristics of EP-MAP Hybrid Machining by Optimization of Magnetic Flux Density (자기력 최적화에 따른 전해-자기 복합가공의 특성 평가에 관한 연구)

  • Park, Chang Geun;Kwak, Jae Seob
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.3
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    • pp.319-324
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    • 2013
  • In this study, an EP (electro-polishing)-MAP (magnetic abrasive polishing) hybrid process was developed as a precision finishing process. To evaluate the characteristics of this EP-MAP hybrid process, a series of experiments were carried out using various working gaps, current densities, and electrolyte concentrations. As a result, $NaNO_3$ was found to be very suitable as the electrolyte of the hybrid process because there was no electrochemical reaction with the CNT-Co composite. Moreover, an increase in the magnetic flux density affected the liquidity of the electrolyte and prevented it from flowing into the CNT-Co composite powder. For that reason, the lower liquidity of the electrolyte increased the thermal energy on the surface of the workpiece.

다상 금속재료의 EBSD 분석

  • Gang, Ju-Hui;Kim, Su-Hyeon;Park, Chan-Hui
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.106.1-106.1
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    • 2012
  • EBSD(Electron BackScattered Diffraction)분석은 주사전자현미경에서 관찰되는 비교적 넓은 영역의 결정 방위를 측정하여 집합조직을 해석하는 동시에 결정 방위의 변화를 기준으로 결정립계를 구분 지어 미세조직의 정량 분석도 가능하기 때문에 많은 연구자들이 사용하고 있다. 그러나 EBSD의 Kikuchi 패턴은 시편 표면으로부터 30~50nm 깊이 범위의 표면층으로부터 방출되기 때문에 EBSD 분석 결과는 시편의 표면 처리 상태에 크게 영향을 받아 적절한 시편준비법이 요구된다. 시편 준비 과정 중에 생기는 변형층, 산화층이나 오염층이 10nm 이내로 제어되지 못하면 명확한 패턴을 얻지 못하여 분석이 어려운 경우가 많으므로, 시료의 절단과 연마 과정 중에 변형층을 되도록 적게 만들고 표면의 산화나 오염을 최대한 방지해야 한다. 또한 EBSD 분석 특성상 시편을 70도로 기울이기 때문에 시편의 요철이 심하면 볼록한 영역에 의해 오목한 영역의 패턴이 가려져 결정방위 정보를 얻기 힘들다. 이런 이유로 시편을 최대한 평평하게 하고 요철이 생기지 않게 시편 준비를 하는 것이 관건이다. 금속재료의 EBSD 시편준비법으로는 일반적으로 기계적 연마법과 전해연마법이 주로 쓰인다. 경한 석출물이나 개재물이 연한 기지에 분산되어 있는 시편이나 이종 소재 접합재의 경우는 전해연마법을 사용하면 특정 상(혹은 합금)이 먼저 연마되어 큰 단차가 생기거나 석출물에 의해 요철이 심해져서 정량적인 EBSD 분석이 어렵게 된다. 이 연구에서는 시편 준비가 어렵다고 알려진 다상 금속재료에서의 EBSD 분석 사례를 소개한다. Ti-6Al-4Fe-0.25Si 시효처리합금, 알루미늄 기지 복합재료, 마찰교반용접한 알루미늄-타이타늄합금의 EBSD 시편준비법과 그 분석 결과를 고찰한다.

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A Study on the Intergrated Finishing Characteristics for Dies and Molds (금형의 복합연마 특성에 관한 연구)

  • 박준민;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.2
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    • pp.14-20
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    • 1998
  • Automatic finishing process requires the development of high efficient and precision abrasive machining method for dies and molds. This study describes the evaluation of the finishing characteristics, such as surfrace roughness, topography and material removal depth of the electrolytic mixed abrasive machining methods. Experimental setup is composed of 3 axis machining center, a newly developed finishing attachment with constant pressure, electrode and electrolytic bath. Finally, we achieved a successful result that surface roughness is $0.01\mu$m Ra and material removal depth is $120\mu$m using electrolytic(0.8A. 30V) mixed abrasive (#400 CBN, #320 SiC) machining method.

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Application and Parameter Optimization of EP-MAP Hybrid Machining for Micro Pattern Deburring (미세 패턴의 디버링을 위한 전해-자기연마 복합가공의 적용과 공정 최적화에 관한 연구)

  • Lee, Sung-Ho;Kwak, Jae-Seob
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.2
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    • pp.114-120
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    • 2013
  • An EP(Electrolytic Polishing)-MAP(Magnetic Abrasive Polishing) hybrid process was applied to remove burr on the micro pattern. Micro pattern fabrication processes are combined with micro milling and EP-MAP hybrid process for deburring. Depending on the micro milling conditions which are applied, micro burrs are formed around the side and top of the pattern. The EP-MAP deburring is used to remove these burrs effectively. To optimize removal rate and form error in the EP-MAP hybrid process, a design of experiment was performed. The effect of deburring process and form error of micro pattern are evaluated via SEM images and the results of AFM.

Performance of Air Electrodes with a Surface-Polished Yttria-Stabilized Zircona Electrolyte for Thin-Film Solid Oxide Fuel Cells (박막 고체산화물 연료전지용 이트리아 안정화 지르코니아 전해질 연마표면상의 공기극 성능)

  • Lee, Yu-Gi
    • Korean Journal of Materials Research
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    • v.11 no.4
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    • pp.283-289
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    • 2001
  • Composite cathodes of 50/50 vol% LSM- YSZ (La$_{1-x}$Sr$_{x}$MnO$_3$-yttria stabilized zirconia) were deposited onto surface- Polished YSZ electrolytes by colloidal deposition technique. The cathode characteristics were then examined by scanning electron microscopy (SEM) and X-ray diffraction (XRD) and studied by ac impedance spectroscopy (IS). The typical impedance spectra measured for an air/LSM- YSZ/YSZ/Pt/air cell at $700^{\circ}C$ were composed of two depressed arcs. Addition of YSZ to the LSM electrode significantly enlarged the triple-phase boundaries (TPB) length inside the electrode, which led to a pronounced decrease in cathodic resistivity of LSM-YSZ composite electrodes. Polishing the electrolyte surface to eliminate the influences of surface impurities and to enlarge the TPB length can further reduce cathode resistivity. The cathodic resistivity of the LSM- YSZ electrodes was a strong function of operation temperature, composition and particle size of cathode materials, applied current, and electrolyte surface roughness.

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Effects of Magnitic Field on Electrochemical Polishing Process (자기장이 전해복합연마공정에 미치는 영향)

  • 김정두;최민석;김동섭
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1994.10a
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    • pp.108-112
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    • 1994
  • The paper describes the effects of magnetic field on the electrochemical polishing process in the view of ionic in the electrolyte. Theoretical background was suggested how magnetic field increases the material removal efficiency and surface finishing ability Magnetic field changes the jonic movement in the electrolyte from linear motion to curved or complex oscillating one, thus increases the electrolytic current density and, as the results, the finishing efficiency.

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Mirrorlike Machining of SUS304 by Combined process of EP and MR Polishing (EP와 MR Polishing 복합공정에 의한 304 스테인리스강의 경면가공)

  • Kim, Dong-Woo;Hong, Kwang-Pyo;Cho, Myeong-Woo;Lee, Eun-Sang
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.2
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    • pp.267-274
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    • 2010
  • Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

Study on the new development of combined electrochemical processes using pulse current (마이크로 펄스 전해 복합가공에 관한 연구)

  • 박정우;이은상;문영훈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.918-921
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    • 2002
  • Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

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