A Study on the characteristics of ultra precision about Buffing and Electropolishing for Semiconductor Large Radius Pipe (반도체용 대구경관의 전해 복합연마에 대한 초정밀 가공 특성연구)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2004.10a
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- pp.609-613
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- 2004