• 대한기계학회논문집B
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• 제33권10호
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• pp.778-782
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• 2009

Recently, we developed a simple thermopneumatic micropump having neither a membrane nor a valve. This micropump discharges liquid by a thermopneumatic pressure and refill by a capillary attraction. In case of the micropump driven by the capillary attraction, the flow characteristic depends mainly on the geometry of the micropump. In this paper, we investigated the influence of the geometry of the micropump on the performance of the micropump to illustrate the properness of the micropump shape. We analyzed the micropump characteristics of six types having different geometries by FVM simulation with a commercial CFD tool. Also we fabricated the micropumps with PDMS and glass by micromachining, and tested the performances. The simulation and the test results illustrate that the discharge volume and the discharge time depend on the chamber volume. The expansion angle of the inlet channel location has influence on the refill time, while the front air channel direction has influence on the backward flow loss.

• Journal of Mechanical Science and Technology
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• 제19권2호
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• pp.649-654
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• 2005

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the JSR (negative PR) molding process, and etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and $30{\mu}m$, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about $0.36\;{\mu}L/sec$ at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V.

• 대한기계학회논문집B
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• 제30권4호
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권10호
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• 설비공학논문집
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• 제23권1호
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• pp.23-31
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• 2011

An analysis has been conducted of the flow characteristics and pumping performance of a thermopneumatic micropump with electrically conducting fluid. In the present study, considered is a thermopneumatic micropump for electrically conducting fluids with electromagnetic resistance alternately exerted at the inlet and outlet by alternately applied magnetic fields. A model of Prescribed Deformation is used for the motion of the membrane. Here, the pumping performance of the micropump and flow characteristics of the electrically conducting fluid are investigated in the range of Hartmann number less than 30. The current numerical study shows that the net flow rate through the micropump is almost proportional to the strength of the applied magnetic field.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권12호
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• pp.591-596
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• 2002

This paper Presents the fabrication and test of a micropump that can be applied to an implantable cerebrospinal fluid shunt system for hydrocephalus patients The proposed micropump consists of a pair of corrugated parylene diaphragm chambers and a set of nozzle and diffuser. The electromagnetic force drives the diaphragms and pumps the fluid. The static or dynamic characteristics of the fabricated devices have been obtained experimentally. The site of the micropump is $14 \times 12 \times 8mm^3$. The flow rate increase by about $3 mell/h$ was observed in the operational pressure range the micropump.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권6호
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• pp.360-366
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• 2000

This paper presents the fabrication and test of a micropump consisting of a pair of Al flap valves and a phase-change type actuator. The actuator is composed of a heater, a silicone rubber diaphragm and a working fluid chamber. The diaphragm is actuated by the vaporization and the condensation of the working fluid. The micropump is fabricated by the anisotropic etching, the boron diffusion and the metal evaporation. The forward and the backward flow characteristics of the flap valves illustrate the appropriateness as a check valve. Also, the flow rate of the micropump is measured. When the square wave input voltage of 8 V, 70% duty ratio and 2 Hz is applied to the heater, the maximum flow rate of the micropump is $97\muell/min$ for zero pressure difference.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1926-1928
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectricdiscs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backward pressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backward pressure of the micropump with diffusers are about $32.9{\mu}{\el}$/min and 173Pa respectively for the above mentioned deflection conditions.

• 한국정밀공학회지
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• 제15권11호
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• pp.93-99
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• 1998

We present a novel micropump of which pumping mechanism is based upon MHD (Magnetohydrodynamic) principle. The MHD micropump uses Lorentz force as pumping source. In the MHD micropump, Lorentz force is applied into initially stagnant conducting fluid to drive it in magnetic and electric field to flow in both directions. The performance of the MHD micropump is obtained by measuring the pressure head difference and flow rate as applied voltage changes from 10 to 60 V DC at 0.19 and 0.44 Tesla. The pressure head difference is 18 mm at 38 mA and the flow rate is 63 ${\mu}{\ell}$ /min at 1.8 mA when the inside diameter of inlet/outlet tube is 2 mm and the magnetic flux density is 0.44 Tesla.