한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.546-547
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- 2002
완화형 강유전체$Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$ 단결정의 광 집적소자 응용을 위한 도파로 제작
Waveguides Fabrication for Optical Integrated Devices Application on Relaxor-ferroelectric $Pb(Mg_{1/3}Nb_{2/3})O_{3}-PbTiO_3$ Single Crystal
- Yang, Woo-Seok (KETI) ;
- Lee, Sang-Goo (IBULE) ;
- Koo, Kyoung-Hwan (IBULE) ;
- Huh, Hyun (Sunchon Cheongam Coll.) ;
- Yoon, Dae-Ho (SungKyunkwan Uni.) ;
- Lee, Han-Young (KETI)
- 발행 : 2002.11.07
초록
Ni thin film on the PMN-PT crystal wafer were deposited by using E-beam evaporator technique. Deposited film was patterned by UV-lithography and etching and was in-diffused at 300~600C. Diffusion profile of Ni ions in PMN-PT was measured by secondary ion mass spectroscopy (SIMS).