한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
- /
- Pages.553-555
- /
- 2002
고주파용 Termination 파워저항의 제작
The fabrication of rf termination power resistor
초록
We were fabricated of rf power resisotor on AlN substrates by thick film process. The characteristics of capacitance and microwave are measured by digital LCR meter and Network analyzer(HP8532D). The results are shown that capacitances are slight greater and microwave characteristics are good values.