Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2002.04a
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- Pages.429-434
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- 2002
Development of a pneumatic actuator for Micro-Positioning control
미세 변위제어를 위한 공압 액추에이터 개발
Abstract
In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state