• Journal of Drive and Control
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• v.5 no.2
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• pp.17-23
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• 2008

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.429-434
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• 2002

In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state