Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Ceramic Microhole Machining using Excimer Laser

Excimer laser를 이용한 세라믹 미세구멍 가공

  • 백병만 (국민대학교 자동차공학 전문대학원) ;
  • 이건상 (국민대학교 자동차공학 전문대학원)
  • Published : 2001.06.27
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Abstract

These days, $Al_[2}O_{3}$ ceramic use all over the industry because dynamic function and special properties to compare traditional material. But $Al_[2}O_{3}$ ceramic is high hardness and brittleness materials. For this reason, it is very difficult to process. Therefor, In this paper, it was investigated that laser process parameter, which can produce appropriate quality of $Al_[2}O_{3}$ ceramic microhole machining utilized Nd:YAG laser and Excimer laser.

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