• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.464-468
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• 1996

To evaluate the surface integrity of machined products such as die, the surface roughness measurement is being much used. Especially, for machining automation and promotion of productivity, the surface roughness measurement technique changes from sepatate measuring system after machining process to the on-the-machine measurement. This study is on the surface roughness measurement by using scattered lights for on-the-machine measurement. This system is designed with a simple optical construction. And experiments are implemented with standard roughness specimen to obtain the parameters which are specularly reflected region parameter and diffusely reflected region parameter. To determine the surface roughness quickly, neural network is used. And this system gives the possibility to apply to the various production processes.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국제학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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• pp.541-544
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• 1993

This paper attempts to propose new procedures to evaluate roughness of ground metallic surface in the range of 1-10.mu.m from data gained by an optical, in-process measurement of the surfaces. Studies are made to process the data of reflected lights pointed at the surface to be measured. Results obtained are compared with those of measurement by stylus roughness meter. Correlations between the two types of roughness measurement are well. The proposed method can be used as a sensor for a polishing robot.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.409-412
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• 2002

This paper presents a measurement method to compromise surface error in surface machining processes. In order to compromise the surface error in machining process, on-machine measurement is essential. There are two kinds of on-machine measurement methods available to measure the surface errors in flat workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are inevitably engaged in both methods. This paper proposes a new idea to measure the surface error for error compensation. The measurement system consists of a laser, a CCD camera and processing system, a carrier system with a stylus, and some optical units. The experimental results show that the proposed method is useful to compensate the surface errors of machined workpieces.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.803-807
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• 2000

This paper deals wi th the establishment of the method of non-contact surface roughness measurement by developed system. One of the most Important factor of determinating quality of a produced manufacture is surface roughness The tendency of manufacturing method is changing from small amount manufactures / high-volume production to large amount manufactures / low volume production, and the study of reducing time for surface roughness measurement has been actively investigated The non-contact surface roughness method by using laser which is different from contact method has been only used to the polished surface, so new surface roughness measurement method was adopted by virtue of Fraunhofer diffraction in the periodic surface for on-the-machine. in this paper, we establish the method of non-contact surface roughness measurement which can reduce measuring time in the periodic surface

• 한국정밀공학회지
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• 제17권1호
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• International Journal of Precision Engineering and Manufacturing
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• 제2권2호
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• pp.73-80
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• 2001

The objective of this research is to develop a measurement error model for sculptured surface in On-Machine Measurement(OMM) process based on a closed-loop configuration. The geometric error model of each axis of a vertical CNC machining center is derived using a 4$\times$4 homogeneous transformation matrix. The ideal locations of a touch-type probe for the sculptured surface measurement are calculated from the parametric surface representation and X-, Y- directional geometric errors of the machine. Also the actual coordinates of the probe are calculated by considering the pre-travel variation of a probe and Z-directional geometric errors. Then, the step-by-sep measurement error analysis method is suggested based on a closed-loop configuration of the machining center including workpiece and probe errors. The simulation study shows the simplicity and effectiveness of the proposed error modeling strategy.

• International Journal of Precision Engineering and Manufacturing
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• 제4권4호
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• pp.57-63
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• 2003

Machining information such as form accuracy and surface roughness is an important factor for manufacturing precise parts. To this regard, OMM (On the Machine Measurement) has been researched for last several decades to alternate CMM (Coordinate Measurement Machine) process. In this research, the OMM system with a laser displacement sensor was developed for measuring form accuracy and surface roughness of the machined workpiece on the machine tool. The surface roughness was estimated comparing the sensory signal with the reference data measured from master specimen. Also, form accuracy was determined from the moving averaged raw data. In addition, the geometric error map constructed beforehand using the geometric errors of the machine tool was used to compensate the obtained form accuracy. The overall performance was compared with CMM result, and verified the feasibility of the measurement system.

• 한국정밀공학회지
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• 제11권6호
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.681-686
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.

• 한국정밀공학회지
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• 제17권7호
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• pp.232-240
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• 2000

Machining information such as machined form and surface roughness accuracy is an important factor for manufacturing precise parts. To this regard, OMM(On the Machine Measurement) has been issued for last several decades to alternate with CMM. In this research, measuring system consisting of a laser probe is developed for machined form and surface roughness measurement on the machine tool. The obtained machined form accuracy is compared with reference one defined in CAD model. The measured surface roughness data is compared with measured master surface beforehand. Furthermore, using the pre-defined volumetric error map approach compensates the geometric accuracy of the machine tool. The overall performance is compared with CMM, and verified the feasibility of the measurement system.