Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
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- Pages.29-32
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- 1999
Fabrication and Properties of GaAs-MIS Capacitor using $SF_6$ Plasma Discharge
$SF_6$ 플라즈마 방전을 이용한 G3AS-MIS 커패시터의 제작 밑 특성
Abstract
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