Development of Temperature Control Xystem for Semiconductor Test Handler I-System Design

반도체 테스트 핸들러의 온도 제어 시스템 개발 I - 시스템 구성

The temperature control system for semiconductor test handler is designed. We controlled the temperature of chamber using 3-wire RTD sensor and MVME EMbedded controller. VxWorks that is a real-time operating system is used and heater is controlled by PWM. Temperature fluctuation of chamber is decreased within 0.3.deg. C, which is about one-half of that of commercial controller.