Development of Temperature Control System for Semiconductor Test Handler II - Controller Design

반도체 테스트 핸들러의 온도제어 시스템 개발 II - 제어기 설계

In this paper presented is a temperature controller for a semiconductor test handler. Using ARMAX model and least square method, the chamber model for the design of a controller is identified through experiment. With the identified model an LQG/LTR controller is designed. Experiment with a real test handler demonstrated good performance in that its overshoot is small and response time is fast.