Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 1996.11a
- /
- Pages.459-463
- /
- 1996
- /
- 2005-8446(pISSN)
A Study on Determination of Quantitative Aberration Using Lateral-Shearing Interferometer
층밀리기 간섭계에 의한 정량적 수차산출에 관한 연구
Abstract
The lateral-shearing interferometer specially devised for production line inspection lenses is presented. The interferometer is composed with immersion oil and four prisms whose relative sliding motion provide lateral-shearing and phase-shifting. A special phase-measuring algorithm of a-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil Three different algorithm for determinating quantitative aberration of aspherical lenses are presented and compared with one another.
Keywords
- lateral-shearing interferometer;
- aberration;
- wavefront;
- zernike-polynomials fitting;
- circular transformation
- 층밀리기 간섭계;
- 수차;
- 파면;
- zernike 다항식 맞춤;
- 원변환;