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A Study for the Improvement of Torn Oxide Defect in STI(Shallow Trench Isolation)Process (STI(Shallow Trench Isolation) 공정에서 Torn Oxide Defect 해결에 관한 연구)

  • Kim, Sang-Yong;Seo, Yong-Jin;Kim, Tae-Hyung;Lee, Woo-Sun;Chung, Hun-Sang;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1998.11c
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    • pp.723-725
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    • 1998
  • STI CMP process are substituting gradually for LOCOS(Local Oxidation of Silicon) process to be available below sub-0.5um technology and to get planarized. The other hand, STI CMP process(especially STI CMP with RIE etch back process) has some kinds of defect like Nitride residue, Torn Oxide defect, etc. In this paper, we studied how to reduce Torn Oxide defects after STI CMP with RIE etch back process. Although Torn Oxide defects which occur on Oxide on Trench area is not deep and not sever, Torn oxide defects on Moat area is sometimes very deep and makes the yield loss. We did test on pattern wafers witch go through Trench process, APCVD process, and RIE etch back process by using an REC 472 polisher, IC1000/SUV A4 PAD and KOH base slurry to reduce the number of torn defects and to study what is the root causes of torn oxide defects.

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Page Replacement Policy of DRAM&PCM Hybrid Memory Using Two Locality (지역성을 이용한 하이브리드 메모리 페이지 교체 정책)

  • Jung, Bo-Sung;Lee, Jung-Hoon
    • IEMEK Journal of Embedded Systems and Applications
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    • v.12 no.3
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    • pp.169-176
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    • 2017
  • To replace conventional DRAM, many researches have been done on nonvolatile memories. The DRAM&PCM hybrid memory is one of the effective structure because it can utilize an advantage of DRAM and PCM. However, in order to use this characteristics, pages can be replaced frequently between DRAM and PCM. Therefore, PCM still has major problem that has write-limits. Therefore, it needs an effective page management method for exploiting each memory characteristics dynamically and adaptively. So we aim reducing an average access time and write count of PCM by utilizing two locality for an effective page replacement. We proposed a page selection algorithm which is recently requested to write in DRAM and an algorithm witch uses two locality in PCM. According to our simulation, the proposed algorithm for the DRAM&PCM hybrid can reduce the PCM write count by around 22% and the average access time by 31% given the same PCM size, compared with CLOCK-DWF algorithm.

Estimation Method of Noise Reducing Devices Installed on the Noise Barrier(3) - Suggestion of Test and Estimation Method - (방음벽 상단소음저감장치의 성능평가 방법에 관한 연구(3) - 시험 및 평가방법의 제안 -)

  • Kim, Chul-Hwan;Chan, Tae-Sun;Kang, Hee-Man;Jeon, Ki-Seong;Kim, Dong-Joon;Chang, Seo-Il
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2008.04a
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    • pp.496-499
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    • 2008
  • The noise reducing devices installed on the noise barrier have been developed in many shapes and ways to reduce noise around road traffic areas. In this study, test and estimation method for the noise reducing device witch installed on the top of a noise barrier was suggested. For this, the authors have considered sound power flow around the device and sound pressure levels for the far field area. To estimate the area effect behind the barrier, area average of noise pressure level difference divided by two area, upper and bellow the sight-line. Comparing the attenuation difference of these areas, the tendency of noise reduction effect was studied according to type of noise reducing devices. Compared with noise shielding efficiency of the devices that using equivalent height of a simple barrier calculated by the SoundPlan, the commercial environment noise simulation software.

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A Syllabic Segmentation Method for the Korean Continuous Speech (우리말 연속음성의 음절 분할법)

  • 한학용;고시영;허강인
    • The Journal of the Acoustical Society of Korea
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    • v.20 no.3
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    • pp.70-75
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    • 2001
  • This paper proposes a syllabic segmentation method for the korean continuous speech. This method are formed three major steps as follows. (1) labeling the vowel, consonants, silence units and forming the Token the sequence of speech data using the segmental parameter in the time domain, pitch, energy, ZCR and PVR. (2) scanning the Token in the structure of korean syllable using the parser designed by the finite state automata, and (3) re-segmenting the syllable parts witch have two or more syllables using the pseudo-syllable nucleus information. Experimental results for the capability evaluation toward the proposed method regarding to the continuous words and sentence units are 73.5%, 85.9%, respectively.

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An Experimental Study on the Fire Risk of Electric Heaters According to Contact of Flammable Materials (가연물 접촉에 따른 전기히터의 화재위험성에 관한 실험적 연구)

  • Lee, Sung-Ryong
    • Fire Science and Engineering
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    • v.25 no.3
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    • pp.63-71
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    • 2011
  • In this study, it was evaluated the fire risk of an electric heater as representative seasonal appliances. Two type of electric heaters were used in experiments. When electric heaters were operated, temperature variation was measured around the heater. Internal structure was understood by Nondestructive inspection. It was evaluated the tire risk of electric heaters, when flammable materials were positioned ear a heater. It was also estimated the probability of a tire in case of malfunction of a safety tip-over witch. When a heater was operated in a normal condition, temperature was maintained under $80^{\circ}C$ around the heater. The possibility of a fire is very high, when a heater is covered with flammable materials or malfunction of safety parts (safety tip-over switch, anti-overheating devices).

Development of Drying System using NIR and Hot Air Method (근적외선 및 열풍방식을 이용한 건조시스템 개발)

  • Ko, Jae-Sub;Choi, Jung-Sik;Kang, Sung-Jun;Baek, Jung-Woo;Jang, Mi-Geum;Moon, Ju-Hui;Chung, Dong-Hwa
    • Proceedings of the KIPE Conference
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    • 2010.07a
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    • pp.589-590
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    • 2010
  • The drying method that is applied in industry is mainly used hot air drying method witch is circulated heated air by generating heat from thermal source. But these methods have problems such as decreasing drying efficiency and waste of energy by low thermal efficiency. Therefore, this paper proposes high efficiency hybrid drying system using near infrared ray(NIR) drying method using halogen lamp and hot air drying method. And this paper proves validity of proposed drying system through experiment about thermal and humidity of drying system inside.

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Error Budget Analysis of Pseudorange for Improving the GPS Positioning Accuracy (GPS 위치정확도 향상을 위한 의사거리 오차의 분석에 관한 연구)

  • Kim, Yong-Il;Kim, Dong-Hyun;Kim, Byung-Guk
    • Journal of Korean Society for Geospatial Information Science
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    • v.4 no.2 s.8
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    • pp.79-90
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    • 1996
  • It is well known that point positioning using a C/A-code receiver is severely biased by errors in pseudorange. This paper shows the procedures of quantitive analysis for several error elements and that some methods to monitor SA(selective availability) of witch process is not opened are proposed. It is possible to verify the effects of SA in the Doppler shift and receiver clock drift variation. Easy methods to reduce SA effects are to fit second order polynomials for the one and a linear function for the other. With periodic autocorrelation functions. SA effects are analyzed and first order Gauss-Markov process parameters are decided.

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Embryonic Effects of Ultrasound Irradiation on Preimplantation Stage of ICR Mouse Embryos - About embryonic death and malformation of ultrasound mechanisms - (초음파(超音波)에 대한 ICR Mouse 착상전기(着床前期)의 개체(個體) Level 영향(影響)(기형(奇形).배사망.(胚死亡))으로부터 초음파(超音波)의 물리학적(物理學的) 특성(特性)에 대한 연구(硏究))

  • Song, Jae-Kwan;Kim, Ye-Hyun
    • Journal of radiological science and technology
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    • v.18 no.2
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    • pp.75-86
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    • 1995
  • Embryos and fetuses are more sensitive to various environmental agents than adults of children biological effects following the exposure, such as intrauterin, malformation, have intimate conception with the prenatal exposure. There have been many studies on radiation and other agent. However, imformation about the ultrasound effects is limited. It is very important to study the effect of ultrasound with these kinds of fatera in consideration of ultrasound protection and safty. In this study, embryonic and fefal effects of ICR mouse embryos irradiated on 24, 48, 12 and 192 hpc of preimplantation and organogenesis period at the intensity of $0.5{\sim}3\;W/cm^2$ were investigated. Many type of external malformation observed in mouse irradiated on 72 hpc and 192 hpc. However, the embryos irradiated on 24 hpc and 48 hpc, at witch embryos had less then 6 cells and were pre-compaction stage, had no sensitivity for external malformation. The threshold doses of external malformation in mouse irradiated on 72 hpc and 192 hpc, at which embryos were consisted of $16{\sim}32$ cells and neural formation stage, were $1\;W/cm^2$ and $0.5\;W/cm^2$.

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Prediction of Welding Imperfection with Idealization of Welding and Their Accuracy (용접이상화에 의한 용접부정의 예측과 정도)

  • Lee, Jae-Yik;Chang, Kyong-Ho;Kim, You-Chul
    • Journal of Welding and Joining
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    • v.31 no.5
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    • pp.15-19
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    • 2013
  • In order to reduce a grand compute time in prediction of welding distortion and residual stress by 3D thermal elastic plastic analysis, idealization of welding that is methods to heat input simultaneously in all weld metal on the same welding direction is carried out on two weld joints(butt welding and fillet welding). Then, the accuracy of acquired results is investigated through the comparison of the high accuracy prediction results. The thermal conduction analysis results by idealization of welding, the temperature is raised accompany with beginning of heat input because all of weld metal is heated input at the same time. On the other side, the temperature witch predicted with high accuracy is raised at the moment heating source passes the measuring points. So, there is difference of time between idealization of welding and considering of moving heat source faithfully. However, temperature history by idealization of welding is well simulated a high accuracy prediction results.

Effect of the Amount of Retained Austenite on the Mechanical Properities of Austempered Ductile Iron (오스템퍼드 구상흑연주철품의 기계적 성질에 미치는 잔류오스테나이트량의 영향)

  • Choi, J.O.;Lee, S.H.;Park, S.T.;Choi, C.O.
    • Journal of the Korean Society for Heat Treatment
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    • v.15 no.4
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    • pp.178-187
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    • 2002
  • Austempered Ductile Iron (ADI) castings having various chemical composition and heat treatment conditions were investigated. Especially, this study was investigated the influence of various parameters on austempering temperature and alloying elements. The addition of Mo, Cu, and Ni individually or combined in these alloys also investigated. The alloying elements influence the austempering reaction, the microstructures, mechanical properties and amount of retained austenite. In this study, the mechanical properties (ultimate tensile strength(UTS), hardness, elongation) are analysed to show the relationship between alloying elements, austempering temperatures and amount of retained austenite. The amount of retained austenite was the range of 15 - 40%. In case of the alloy to witch Mo, Cu, and Ni was added, the amount of retained austenite was the largest at a constant austempering temperature.