• 제목/요약/키워드: wear simulation

검색결과 249건 처리시간 0.024초

화학 기계적 연마에서 패드표면 특성이 웨이퍼 불균일도에 미치는 영향 (Pad Surface Characteristics and their Effect on Within Wafer Non-Uniformity in Chemical Mechanical Polishing)

  • 정석훈;이현섭;정문기;신운기;이상직;박범영;김형재;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.58-58
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    • 2009
  • Uniformity related issues in chemical mechanical polishing (CMP) are within wafer non-uniformity (WIWNU), wafer to wafer non-uniformity (WTWNU), planarity and dishing/erosion. Here, the WIWNU that originates from spatial distribution of independent variables such as temperature, sliding distance, down force and material removal rate (MRR) during CMP, relies to spatial dependency. Among various sources of spatial irregularity, hardness and modulus of pad and surface roughness in sources for pad uniformity are great, especially. So, we investigated the spatial variation of pad surface characteristics using pad measuring system (PMS) and roughness measuring system. Reduced peak height ($R_{pk}$) of roughness parameter shows a strong correlation with the removal rate, and the distribution of relative sliding distance onwafer during polishing has an effect on the variation of $R_{pk}$ and WIWNU. Also, the results of pad wear profile thorough developed pad profiler well coincides with the kinematical simulation of conditioning, and it can contribute for the enhancement of WIWNU in CMP process.

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레일손상에 의한 윤중증가를 고려한 표면균열 성장예측 (Prediction of Surface Crack Growth Considering the Wheel Load Increment Due to Rail Defect)

  • 전현규;최진유;나성훈;유원희
    • 한국정밀공학회지
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    • 제28권9호
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    • pp.1078-1085
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    • 2011
  • Prediction of a minimum crack size for growth, which is defined as a crack size that grows fast enough to keep ahead of its removal by contact wear and periodic grinding, is the most demanding work to prevent rail from fatigue failure and develop cost effective railway maintenance strategy In this study, we investigated the wheel load increment due to a rail defect during a train ran over it, and its effect on the minimum crack size for growth. For this purpose, we developed simulation software based on the Fletcher and Kapoor's "2.5D" model and measured wheel load increment during a train passed over a defect. A maximum contact pressure and contact patch size were calculated by 3D FEM and crack growth analyses were performed by varying two of dominant contact contributors; surface friction coefficient(0.1, 0.2, 0.3 and 0.4) and crack aspect ratio. The minimum crack sizes for growth were calculated from 0.29 to 1.44mm depending on the contact conditions. They were decreasing with increasing surface friction coefficient and decreasing with crack aspect ratio(a/b).

광섬유 간섭계 센서를 이용한 선삭가공 공구진동 측정 연구 (A Study on the Tool Vibration Measurement Using the Fiber Optic Interferometric Sensor in Lathe Cutting Process)

  • 이종길
    • 대한공업교육학회지
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    • 제32권2호
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    • pp.171-187
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    • 2007
  • 이 연구의 목적은 선삭 가공시 발생하는 채터 진동을 계측하기 위하여 일반적인 가속도계가 가진 단점을 보완한 페브리-페롯형(Fabry-Prtot) 광섬유 간섭계 센서를 공구에 직접 부착하여 채터 진동을 측정하고 이것의 유용성을 확인하는 것이다. 측정된 주파수 스펙트럼과 이론해석 상의 리셉턴스 곡선과 비교하였는데 공구진동이 클수록 가진 주파수 이동이 생성되며 이는 공구의 날 끝에 질량효과가 더해짐을 의미함을 알 수 있었다. 질량효과가 더해지면 진동 주파수는 저주파 쪽으로 이동한다. 진동 주파수의 저주파 영역의 이동은 일반적인 재생형 채터에서 흔히 일어나는 현상이다. 또한 측정한 채터 주파수는 고유진동수가 아닌 외부 가진 주파수인 것으로 확인 됐으며 측정 결과와 같이 본 실험에 사용된 광섬유 센서는 외부 진동 주파수를 잘 계측 하였으며 페브리-페롯 센서는 특히 공구진동의 측정에 유용함을 보았다. 본 연구를 통하여 적용분야로 간섭계형 광섬유 센서를 공구 표면에 직접 설치하고 공구 진동을 관찰하는 교육목적의 실험에도 응용할 수 있다. 본 실험과 같은 페브리-페롯 간섭계 센서의 공구 직접 접촉식 방법에 대한 연구는 국내외 적으로 그 사례를 찾아보기 힘든 독창적인 방법인 것으로 추정된다. 본 연구결과는 또한 향후 공구진동과 마멸을 연구하는데 기초 자료로 활용할 수 있을 것으로 판단된다.

선박용 디젤기관의 열화성능 예측에 관한 연구 (Predictions of the deteriorating performance for the marine diesel engines)

  • 정찬호;노범석;이지웅;최재성
    • Journal of Advanced Marine Engineering and Technology
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    • 제37권1호
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    • pp.47-52
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    • 2013
  • 최근 고유가 시대를 경험한 이후 에너지 수급에 대한 불안감이 증대됨과 동시에 지구온난화, 대기오염문제 등과 관련하여 대체에너지의 개발과 고효율 친환경 기술개발에 대한 요구가 강화되고 있다. 특히, IMO(국제해사기구)의 MEPC에서는 부속서 6을 $CO_2$의 규제법으로 하고자 하는 논의가 진행 중이다. 한편, 선박의 에너지효율을 향상시키고자 하는 다양한 기술들은 대부분 주로 새로운 기술의 개발과 신조선에의 적용에만 관심이 집중되고 있다. 그러나 선박기관은 일반적으로 장시간의 운항으로 그 성능은 점점 저하되고 운전조건 또한 변화되기 때문에 운항중인 기존선의 운항조건에 최적화된 기관의 운전관리야말로 친환경 및 고효율화 대책에 실질적이면서 매우 유익한 대책이 될 수 있다. 본 논문은 선박엔진의 성능저하정도를 정량적으로 예측하고자 하는 내용으로 엔진의 성능을 저하시키는 주요 인자들과 급기효율저하, 블로바이 가스증가 및 연료분사상태의 악화로 인한 연소악화 등이 엔진성능에 미치는 영향을 예측, 검토하였다.

공구경로 곡면을 이용한 이송속도 최적화 (Feedrate Optimization Using CL Surface)

  • 김수진;정태성;양민양
    • 한국정밀공학회지
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    • 제21권4호
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    • pp.39-47
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    • 2004
  • In mold machining, there are many concave machining regions where chatter and tool deflection occur since MRR(material removal rate) increases as curvature increases even though cutting speed and depth of cut are constant. Boolean operation between stock and tool model is widely used to compute MRR in NC milling simulation. In finish cutting, the side step is reduced to about 0.3mm and tool path length is sometimes over loom, so Boolean operation takes long computation time and includes much error if the resolution of stock and tool model is larger than the side step. In this paper, curvature of CL (cutter location) surface and side step of tool path is used to compute the feedrate for constant MRR machining. The data structure of CL surface is Z-map generated from NC tool path. The algorithm to get local curvature from discrete data was developed and applied to compute local curvature of CL surface. The side step of tool path was computed by point density map which includes cutter location point density at each grid element. The feedrate computed from curvature and side step is inserted to new tool path to regulate MRR. The resultants were applied to feedrate optimization system which generates new tool path with feedrate from NC codes for finish cutting. The system was applied to the machining of speaker and cellular phone mold. The finishing time was reduced to 12.6%, tool wear was reduced from 2mm to 1.1mm and chatter marks and over cut on corner were reduced, compared to the machining by constant feedrate. The machining time was shorter to 17% and surface quality and tool was also better than the conventional federate regulation using curvature of the tool path.

진바지의 착용 후 부위별 피로도에 관한 연구 (Fatigue Phenomenon of Mechanical Properties in Jean Slacks by the after Wearing)

  • 이창미;김태규;권오경
    • 한국의류학회지
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    • 제22권2호
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    • pp.257-266
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    • 1998
  • This study was conducted to examine the changes of the mechanical properties of the position in jean slacks during the wear, previously used for the wearing test, which were subjected to repeated tensile-shearing deformation using a simulated fatigue tester has been investigated and compared, by calculating both mechanical properties and hand value(HV) of these fabrics with KES-F system and the by obtaining the THV through these calculated properties. The results are as follows. 1. The fatigue phenomenon of mechanical properties was the LT, 2H B, 2HBS, MMD, SMD, RC values increased, elasticity values of tensile, bending and shearing properties, such as B, G and compression properties LC, WC were reduced. It was shown, then, that those fabrics lost their elasticity and became flexible and soft with the increase of fatigue. 2. The hand value and THV; except anterior knee from all part of KOSHI, NUMERI, FUKURAMI was decreased. 3. The fatigue phenomenon of hand value was different on the position of clothing; on the position of hip, rate of B, G smaller than other parts and KOSHI was decreased, on the part of anterior thigh was FUKURAMI was increased, on the anterior knee RC, NUMERI, THV was increased, on the posterior knee was 2HB, 2HG, 2HGS showed increasedgreater than any other part and on the hem of back, MMD was increased, but NUMERI was decreased. 4. The changing process of mechanical properties in the simulation testing by the fatigue tester has similar tendency to that of the wearing tester. It is concluded that this testing method is useful to predict the fatigue phenomena of fabrics caused by wearing.

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의복 디자인 시스템을 이용한 웹 3차원 의복 애니메이션 구현 (Implementation of 3Dimension Cloth Animation based on Cloth Design System)

  • 김주리;이혜정;정석태
    • 한국정보통신학회논문지
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    • 제15권10호
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    • pp.2157-2163
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    • 2011
  • 본 논문에서는 가상 공간에서 의상을 직접 입어보는 체험을 해 볼 수 있는 웹 3차원 의복 애니메이션을 구현하기 위하여 2차원 및 2.5차원 의복 디자인 시스템을 이용한 3차원 의복 애니메이션 시스템을 설계하였고, 자연스러운 드레이핑을 구현하기 위하여 메시 생성 및 변형 알고리즘, 영역 추출 알고리즘, 워프 알고리즘, 명암 추출 및 적용 알고리즘을 이용하였다. 그리고 2차원 및 2.5차원 의복 디자인 시스템에서 추출된 좌표 점은 텍스트 형식의 데이터로 받아 의복 정보 파일로 입력하게 된다. 또한 이 의복 정보 파일은 3차원 의복 애니메이션에 활용할 수 있도록 구현하였다.

FLUID-STRUCTURE INTERACTION IN A U-TUBE WITH SURFACE ROUGHNESS AND PRESSURE DROP

  • Gim, Gyun-Ho;Chang, Se-Myoung;Lee, Sinyoung;Jang, Gangwon
    • Nuclear Engineering and Technology
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    • 제46권5호
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    • pp.633-640
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    • 2014
  • In this research, the surface roughness affecting the pressure drop in a pipe used as the steam generator of a PWR was studied. Based on the CFD (Computational Fluid Dynamics) technique using a commercial code named ANSYS-FLUENT, a straight pipe was modeled to obtain the Darcy frictional coefficient, changed with a range of various surface roughness ratios as well as Reynolds numbers. The result is validated by the comparison with a Moody chart to set the appropriate size of grids at the wall for the correct consideration of surface roughness. The pressure drop in a full-scale U-shaped pipe is measured with the same code, correlated with the surface roughness ratio. In the next stage, we studied a reduced scale model of a U-shaped heat pipe with experiment and analysis of the investigation into fluid-structure interaction (FSI). The material of the pipe was cut from the real heat pipe of a material named Inconel 690 alloy, now used in steam generators. The accelerations at the fixed stations on the outer surface of the pipe model are measured in the series of time history, and Fourier transformed to the frequency domain. The natural frequency of three leading modes were traced from the FFT data, and compared with the result of a numerical analysis for unsteady, incompressible flow. The corresponding mode shapes and maximum displacement are obtained numerically from the FSI simulation with the coupling of the commercial codes, ANSYS-FLUENT and TRANSIENT_STRUCTURAL. The primary frequencies for the model system consist of three parts: structural vibration, BPF(blade pass frequency) of pump, and fluid-structure interaction.

건식 듀얼 클러치의 열해석 모델에 대한 연구 (A Study on Thermal Analytical Model for a Dry Dual Clutch)

  • 류하오;이재천;노유정;조종환;이희락;고재욱;강지우
    • 드라이브 ㆍ 컨트롤
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    • 제12권1호
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    • pp.1-8
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    • 2015
  • The stability of friction characteristics and thermal management for a dry type dual clutch transmission (DCT) are inferior to those of a wet clutch. Too high temperature resulting from frequent engagement of DCT speeds up degradation or serious wear of the pressure plate or burning of the clutch disk lining. Even though it is significantly important to estimate the temperature of a dry double clutch (DDC) in real-time, few meaningful study of the thermal model of DDC has been known yet. This study presented a thermal analytical model of lumped parameters for a DDC by analyzing its each component firstly. Then a series of experimental test was carried out on the test bench with a patented temperature telemetry system to validate the proposed thermal model. The thermal model, whose optimal parameter values were found by optimization algorithm, was also simulated on the experimental test conditions. The simulation results of DDC temperature show consistency with the experiment, which validates the proposed thermal model of DDC.

페이지 비율 분석 기반의 NAND 플래시 메모리를 위한 가비지 컬렉션 기법 (Garbage Collection Method for NAND Flash Memory based on Analysis of Page Ratio)

  • 이승환;옥동석;윤창배;이태훈;정기동
    • 한국정보과학회논문지:컴퓨팅의 실제 및 레터
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    • 제15권9호
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    • pp.617-625
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    • 2009
  • NAND 플래시 메모리는 부피가 작고, 가볍고, 소비전력이 낮으며 입출력이 빠르고 집적도가 높아 최근 임베디드 기기들에 널리 사용되고 있다. 그러나 NAND 플래시 메모리는 지움 연산을 수반하는 가비지 컬렉션 연산을 수행해야 한다. 게다가 지움 연산은 속도가 느리고, 각 블록마다 지움 연산 횟수가 제한이 있다. 따라서 제안하는 가비지 컬렉션 기법은 전체 지움 연산 횟수와 각 블록의 지움 횟수 편차를 감소시키고, 가비지 컬렉션 수행 시간을 최소화하는데 초점을 맞춘다. NAND 플래시 메모리는 유효 페이지, 무효 페이지, 빈 페이지로 구성되어 있다. 제안하는 기법은 페이지들의 비율을 이용해 가비지 컬렉션의 수행 시기를 결정하고 대상 블록을 선택한다. 그리고 할당 기법과 그룹 관리기법을 추가적으로 구현하였다. 실험 결과 제안한 정책은 기존의 Greedy나 CAT 기법에 비해 전체 지움 횟수를 최소화 하면서, 최대 82% 지움 횟수 편차를 감소시켰고, 최대 75%의 가비지 컬렉션 수행 시간을 단축시켰다.