• Laser Solutions
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• v.8 no.1
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• pp.9-18
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• 2005

The laser direct writing method using a UV Argon-ion laser is studied for fabrication of waveguide. The laser direct writing system is constructed with a vision camera, a xy-stage, a motion controller and the delivery components of a laser beam. The UV Argon-ion laser has wavelength range of $333.6\~363.8$ nm. A photo-active UV curable polymer for a planar light-wave circuit(PLC) of single mode is used. This polymer is irradiated by Argon-ion laser and developed by a solvent after a post-baking. The optimum laser direct writing condition is obtained experimentally by changing various process parameters such as laser power, writing speed and focal length. The propagation and coupling loss of a optical waveguide was measured as 1dB/cm and 0.6dB/cm, respectively. Also, the minimum width of waveguide of $100{\mu}m$(ZPLW-207) is obtained. Finally, the waveguides of line, bend and branch type are successfully fabricated.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.42-47
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• 2003

The laser direct writing method has some advantages of being maskless, allowing rapid and inexpensive prototyping in comparison to conventional mask-based photolithography. In general, there are two kinds of laser direct writing methods such as the laser ablation method and the laser polymerization method. The laser polymerization method was studied fur manufacturing waveguide in this paper. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, focusing height and optical properties of polymer. Experimentally, the optical waveguide was manufactured trapezoid shape. Through SEM the waveguide was 20 ${\mu}{\textrm}{m}$ width and 7.4 ${\mu}{\textrm}{m}$ height.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.391-394
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• 2003

Laser direct writing process is developed 3rd harmonic Diode Pumped Solid State Laser with the near visible wavelength of 355 m sensitive polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, laser focus and optical properties of polymer. This process could be to fabricate a single mode waveguide without expensive mask projection method. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8.4 mm width and 7.5 mm height. Propagation loss of straight waveguide measured 3 dB/cm at 1,550 nm.

• Computational Structural Engineering
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• v.17 no.3
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• pp.53-56
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.116-117
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• 2004

• Proceedings of the Korean Society of Laser Processing Conference
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• 2002.11a
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• pp.91-94
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• 2002

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.13-14
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• 2006

The use of soft-lithography instead of standard photolithography and dry etching technologies is attractive because inexpensive optical device can be realized. Polymerization using multi-photon absorption of materials is also a good method for optical waveguide fabrication. Laser induced self-writing technology of optical waveguide is also very simple and attractive. Using these processes, we can fabricate and interconnect optical circuits at once. In this presentation, several simple fabrication methods will be introduced. New optical loss evaluation method for polymer optical waveguides will also be presented

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.114-115
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• 2004

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.612-615
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• 2003

Maskless laser patterning process is developed using 3rd harmonic Diode Pumped Solid State Laser with near visible wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and polymer optical property to gain the optimal conditions. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8${\mu}{\textrm}{m}$ width and 5.4${\mu}{\textrm}{m}$ height. This process could be applied to fabricate a single mode waveguide without expensive mask projection method.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.3
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• pp.343-351
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• 1988

Planar optical waveguides are fabricated on a Y-cut LiNbO3 single crystal substrate by Ti indiffusion method. From data measured by the bright M-line spectroscopy, refractive index profiles are reconstructed by WKB approximation method. Then, single strip, X-crossing strip, and Y-brinch strip optical waveguides are fabricated on X-cut LiNbO3 single crystal substrate, with waveguide patterns made by the laser beam direct writing method. And their near-field intensity profiles are observed after coupling the light to the waveguide edges.