Browse > Article

Optical Waveguide Fabrication using Laser Direct Writing Method  

김정민 (한국기계연구원 지능형정밀기계연구부)
신보성 (부산대학교 ERC/NSDM)
김재구 (한국기계연구원 지능형정밀기계연구부)
장원석 (한국기계연구원 지능형정밀기계연구부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.12, 2003 , pp. 42-47 More about this Journal
Abstract
The laser direct writing method has some advantages of being maskless, allowing rapid and inexpensive prototyping in comparison to conventional mask-based photolithography. In general, there are two kinds of laser direct writing methods such as the laser ablation method and the laser polymerization method. The laser polymerization method was studied fur manufacturing waveguide in this paper. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, focusing height and optical properties of polymer. Experimentally, the optical waveguide was manufactured trapezoid shape. Through SEM the waveguide was 20 ${\mu}{\textrm}{m}$ width and 7.4 ${\mu}{\textrm}{m}$ height.
Keywords
Laser Direct Writng; Polymerization; Waveguide; Polymer;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
연도 인용수 순위
1 Wang, C., Chan, Y and Lam, Y., 'Fabrication of diffractive optical elements with arbitary surface-relief profile by direct laser writing,' Opt. Eng. Vol. 41, No. 6, pp. 1240-1245, 2002   DOI   ScienceOn
2 Salgueiro, J.R., Roman, J.F. and Vicente, Moreno., 'System for laser writing to lithography masks for integrated optics,' Opt. Eng., Vol. 37, No. 4, pp. 1115-1123, 1998   DOI   ScienceOn
3 Eldada, L., Xu, C., Stengle, K.M.T., Shacklette, L.W. and Yardly, J.T., 'Laser-Fabrication Low Loss Single-Mode Raised-Rib Waveguiding Device In Polymer,' J. Lightwave Technol., Vol. 14, pp.1704, 1996   DOI   ScienceOn
4 Wong, W.H., Zhou, J. and Pun, E.Y., 'Low-loss polymeric optical waveguide using electron-beam direct writing,' Applied Physics Letters, Vol.78, No.15, pp.2110-2112, 2001   DOI   ScienceOn
5 Chraters, R. and Luther-Davis, B., SPIE Proc. Vol. 4279, pp.101, 1988   DOI
6 Fardad, A., Andrews, M., Milova, G., Malek-Tabrizi, A. and Najafi, I., 'Fabrication of ridge waveguides: a new solgel route,' Appl. Opt., Vol. 37, pp. 2429, 1998
7 Franke, H., 'Optical recording of refractive-index patterns in doped poly-(methyl methacrylate) films,' Appl. Opt., Vol. 23, pp. 2729, 1985   ScienceOn
8 Okamoto, N. and Tashiro, S., Opt. Commum., Vol. 66, pp. 93, 1998   DOI   ScienceOn
9 www.zenphotonics.com
10 Chrisey, D.B., Pique, A., Fitz-Gerald, J., Auyeung, R.C.Y., McGill, R.A., Wu, H.D., Duignan, M., 'New approach to laser direct writing active and passive mesoscope circuit elements,' Applied Surface Science, Vol. 154-155, pp. 594-600, 2000   DOI   ScienceOn
11 Wong, W.H. and Pun, E.Y., 'Polymeric waveguide wavelength filters using electron-beam direct writing,' Applied Physics Letters, Vol. 79, No. 22, pp. 3576-3578, 2001   DOI   ScienceOn
12 Bae, B.S, Park, O.H., Charters, R., Luther-Davies, B., Atkins, G.R., 'Direct laser writing of self-developed waveguides in benzyl dimethy ketal-doped sol-gel hybrid glass,' J. Mat. Res., Vol. 16, No. 11, pp. 3184-3187, 2001   ScienceOn
13 Baek, N.K., Kim, D.E., 'Optimization of laser lithography technique based on taghchi method,' J. of the KSPE, Vol. 19, No. 7, pp. 59-63, 2002   과학기술학회마을
14 Jung, J.I., Park, O.H. and Bae, B.S., 'Fabrication of channel waveguide by photochemical self-developing in doped sol-gel hybrid glass,' J. Sol-Gel Tech, Vol. 26, pp. 897-901, 2003   DOI   ScienceOn