• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.433-433
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• 2012

As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

• Journal of Conservation Science
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• v.34 no.5
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• pp.379-385
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• 2018

This study examined the condition of degraded plastic artifacts and conducted materials assessments for conservation treatment. The properties and bond characteristics of five types of adhesives(EVA, PVAc, Cyanoacrylate) were evaluated to select the adhesive most suitable for conservation treatment. The degradation of plastic artifacts caused cracks, peelings, and surface warping. According to the FT-IR analysis, the synthetic resin used in the artifact was estimated to EVA type. The properties of the adhesives were evaluated through acidity, and hardness measurements. The results showed that acidity varies with the type of adhesive, and that the hardness of PVAc was higher than those of EVA. On comparing the bond characteristics of the samples after artificial degradation, it was found that PVAc and Cyanoacrylate increased the chromaticity and hardness of the samples, while EVA was the most stable with relatively little change. Thus, EVA was confirmed to be the most suitable materials for conservation treatment of degraded plastic artifacts. In this study, as the experiment of treatment materials based on actual artifact, it is expected that it could be used a basis research for conservation treatment of plastic artifacts.

• Applied Chemistry for Engineering
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• v.17 no.6
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• pp.604-608
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• 2006

Polymer composites for measuring the radioactive contamination are prepared by coating ZnS(Ag) powders as a scintillator on polysulfone base layer. The composites consist of the active layer for a scintillation reaction with radioactive wastes and the transparent support layer for transmittance of light photons emitted by scintillation in the active layer. The binding of the active layer, including ZnS(Ag), on the support layer is proceeded via coating with polysulfone as a binder, without any extra adhesive. The coating was obtained by either casting via a Doctor Blade as applicator or screen printing. The prepared composites feature a monolithic structure, resulting in the complete adhesion between two layers. The composite prepared by the casting technique using an applicator holds a good detection efficiency in measuring the alpha radionuclide, but its structure becomes fragile because of warping in morphology. On the contrary, the composite prepared by the screen printing shows a good detection capacity as well as a good stability in a mechanical shape.

• Journal of the Earthquake Engineering Society of Korea
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• v.13 no.1
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• pp.35-43
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• 2009

Two types of piloti-type high-rise RC building structures having irregularity in the lower two stories were selected as prototypes, and nonlinear time history analysis was performed using OpenSees to verify the analysis technique and to investigate the seismic capacity of those buildings. One of the buildings studied had a symmetrical moment-resisting frame (BF), while the other had an infilled shear wall in only one of the exterior frames (ESW). A fiber model, consisting of concrete and reinforcing bar represented from the stress-strain relationship, was adapted and used to simulate the nonlinearity of members, and MVLEM (Multi Vertical Linear Element Model) was used to simulate the behavior of the wall. The analytical results simulate the behavior of piloti-type high-rise RC building structures well, including the stiffness and yield force of piloti stories, the rocking behavior of the upper structure and the variation of the axial stiffness of the column due to variation in loading condition. However, MVLEM has a limitation in simulating the abrupt increasing lateral stiffness of a wall, due to the torsional mode behavior of the building. The design force obtained from a nonlinear time history analysis was shown to be about $20{\sim}30%$ smaller than that obtained in the experiment. For this reason, further research is required to match the analytical results with real structures, in order to use nonlinear time history analysis in designing a piloti-type high-rise RC building.

• Journal of the Korean Geotechnical Society
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• v.28 no.6
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• pp.19-29
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• 2012

Pack micropiles were recently developed to improve pile capacity of general micropiles. Pack micropiles were made by warping thread bar or steel pipe of general micropile by geotexlile pack and grouting inside the pack with pressure. According to the pressure, the boring hole could be enlarged. A series of pile uplift tests were performed on three micropiles. Two out of the three piles were the pack micropiles and the other was the general micropile, in which a thread bar was used in the boring hole. According to the pressure applied to the pack micropiles, the diameter of boring hole was enlarged from 152 mm to 220 mm. Unit skin friction mobilized on side surfaces of micropiles increased with displacement of pile head and reached on a constant value, which represents that the relative displacement between piles (or thread bar) and soils was reached on critical state. And the uplift resistance of pack micropile was higher than that of general micropile. Two reasons can be considered: One is that the frictional surface increases due to enlarging diameter of boring holes and the other is that the unit skin friction could increase due to compressing effect of surrounding soils by soil displacement as much as the enlarging volume of boring hole. The compression effect appeared at deeper layer rather than surface layer. The unit skin friction mobilized on micropiles with small diameter was higher than the ones on large bored piles.

• The KIPS Transactions:PartD
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• v.11D no.6
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• pp.1259-1268
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• 2004

To organize training in limited training area for an actuai combat, realistic training simulation plugged in by various battle conditions is essential. In this paper, we propose a virtual target overlay technique which does not use a virtual image, but Projects a virtual target on ground-based CCD image by appointed scenario for a realistic training simulation. In the proposed method, we create a realistic 3D model (for an instructor) by using high resolution Geographic Tag Image File Format(GeoTIFF) satellite image and Digital Terrain Elevation Data (DTED), and extract the road area from a given CCD image (for both an instructor and a trainee). Satellite images and ground-based sensor images have many differences in observation position, resolution, and scale, thus yielding many difficulties in feature-based matching. Hence, we propose a moving synchronization technique that projects the target on the sensor image according to the marked moving path on 3D satellite image by applying Thin-Plate Spline(TPS) interpolation function, which is an image warping function, on the two given sets of corresponding control point pair. To show the experimental result of the proposed method, we employed two Pentium4 1.8MHz personal computer systems equipped with 512MBs of RAM, and the satellite and sensor images of Daejoen area are also been utilized. The experimental result revealed the effective-ness of proposed algorithm.

• The KIPS Transactions:PartD
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• v.11D no.2
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• pp.247-258
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• 2004

Recently, there have been researches on storage and retrieval technique of moving objects, which are highly concerned by user in database application area such as video databases, spatio-temporal databases, and mobile databases. In this paper, we propose a new signature-based indexing scheme which supports similar sub-trajectory retrieval at well as good retrieval performance on moving objects trajectories. Our signature-based indexing scheme is classified into concatenated signature-based indexing scheme for similar sub-trajectory retrieval, entitled CISR scheme and superimposed signature-based indexing scheme for similar sub-trajectory retrieval, entitled SISR scheme according to generation method of trajectory signature based on trajectory data of moving object. Our indexing scheme can improve retrieval performance by reducing a large number of disk access on data file because it first scans all signatures and does filtering before accessing the data file. In addition, we can encourage retrieval efficiency by appling k-warping algorithm to measure the similarity between query trajectory and data trajectory. Final]y, we evaluate the performance on sequential scan method(SeqScan), CISR scheme, and SISR scheme in terms of data insertion time, retrieval time, and storage overhead. We show from our experimental results that both CISR scheme and SISR scheme are better than sequential scan in terms of retrieval performance and SISR scheme is especially superior to the CISR scheme.

• Journal of Korean Society of Steel Construction
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• v.10 no.1 s.34
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• pp.47-61
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• 1998

The behavior of horizontally curved I-girder bridges is complex because the flexural and torsional behavior of curved girders are coupled due to their initial curvature. Also, the behavior is affected by cross beams. To investigate the behavior of horizontally curved I-girder bridges, it is necessary to consider curved girders with cross beams. In order to perform free vibration analyses of horizontally curved I-girder bridges, a finite element formulation is presented here and a finite element analysis program is developed. The formulation that is presented here consists of curved and straight beam elements, including the warping degree of freedom. Based on the theory of thin-walled curved beams, the shape functions of the curved beam elements are derived from homogeneous solutions of the static equilibrium equations. Third-order hermits polynomials are used to form the shape functions of the straight beam elements. In the finite element analysis program, global stiffness and mass matrix are composed, based on the Cartesian coordinate system. The Gupta method is used to efficiently solve the eigenvalue problem. Comparing the results of several examples here with those of previous studies, the formulation presented is verified. The validity of the program developed is shown by comparing results with those analyzed by the shell element.

• KIPS Transactions on Software and Data Engineering
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• v.2 no.10
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• pp.723-730
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• 2013

This paper presents the design of an arm gesture recognition system using Kinect sensor. A variety of methods have been proposed for gesture recognition, ranging from the use of Dynamic Time Warping(DTW) to Hidden Markov Models(HMM). Our system learns a unique HMM corresponding to each arm gesture from a set of sequential skeleton data. Whenever the same gesture is performed, the trajectory of each joint captured by Kinect sensor may much differ from the previous, depending on the length and/or the orientation of the subject's arm. In order to obtain the robust performance independent of these conditions, the proposed system executes the feature transformation, in which the feature vectors of joint positions are transformed into those of angles between joints. To improve the computational efficiency for learning and using HMMs, our system also performs the k-means clustering to get one-dimensional integer sequences as inputs for discrete HMMs from high-dimensional real-number observation vectors. The dimension reduction and discretization can help our system use HMMs efficiently to recognize gestures in real-time environments. Finally, we demonstrate the recognition performance of our system through some experiments using two different datasets.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.6
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• pp.256-262
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• 2018

A great amount of fly ash, which is a waste from a thermal power plant, has not been appropriately recycled until now. Landfill of flay ash causes environmental pollution and enormous economic costs. In this study, manufacturing of architectural ceramic tile was investigated replacing fly ash with clay raw material. The properties of porcelain tile was analyzed after manufacturing porcelain tile with mineral based glaze and fast firing process. In particular, the effect of the fly ash addition on the properties of ceramic tile was investigated by increasing the amount of limestone addition. Porcelain tile with fly ash showed excellent bending strength, water absorption, warping and abrasion resistance. However, a significant decrease in durability was observed through the autoclave test. Addition of limestone increased the water absorption, twisting and hydration expansion of the ceramic tile, but it was confirmed that the durability of the ceramic tile with fly ash was greatly improved. In conclusion, recycled architectural ceramic tiles, which can meet domestic construction standards, could be manufactured with the addition of fly ash and limestone.