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2D Fluid Modeling of Ar Plasma in a 450 mm CCP Reactor

  • Yang, Won-Gyun;Kim, Dae-Ung;Yu, Sin-Jae;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.267-267
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    • 2012
  • 최근 국내 반도체 장비 업체들에 의해서 차세대 반도체용 450 mm 웨이퍼 공정용 장비 개발이 진행 중에 있다. 반도체 산업은 계속해서 반도체 칩의 크기를 작게 하고, 웨이퍼 크기를 늘리면서 웨이퍼 당 칩수를 증가시켜 생산성을 향상해오고 있다. 현재 300 mm 웨이퍼에서 450 mm 웨이퍼를 도입하게 되면, 생산성 뿐만 아니라 30%의 비용절감과 50%의 cycle-time 단축이 기대되고 있다. 장비에 대한 이해와 공정에 대한 해석 능력을 위해 비용과 시간이 많이 들기 때문에 최근 컴퓨터를 활용한 수치 모델링이 진행되고 있다. 또한, 수치 모델링은 실험 결과와의 비교가 필수적이다. 본 연구에서는 450 mm 웨이퍼 공정용 장비의 전자밀도를 cut off probe를 통해 100 mTorr에 서 Ar 플라즈마를 파워에 따라 측정했다. 13.56 MHz 200 W, 500 W, 1,000 W로 입력 파워가 증가하면서 웨이퍼 중심에서 $6.0{\times}10^9#/cm^3$, $1.35{\times}10^{10}#/cm^3$, $2.4{\times}10^{10}#/cm^3$로 증가했다. 450 mm 웨이퍼 영역에서 전자 밀도의 불균일도는 각각 10.31%, 3.24%, 4.81% 였다. 또한, 이 450 mm 웨이퍼용 CCP 장비를 축대칭 2차원으로 형상화하고, 전극에 13.56 MHz를 직렬로 연결된 blocking capacitor ($1{\times}10^{-6}$ F/$m^2$)를 통해 인가할 수 있도록 상용 유체 모델 소프트웨어(CFD-ACE+, EXI corp)를 이용하여 계산하였다. 주요 전자-중성 충돌 반응으로 momentum transfer, ionization, excitation, two-step ionization을 고려했고, $Ar^+$$Ar^*$의 표면 재결합 반응은 sticking coefficient를 1로 가정했다. CFD-ACE+의 CCP 모델을 통해 Poisson 방정식을 풀어서 sheath와 wave effect를 고려하였다. Stochastic heating을 고려하지 않았을 때, 플라즈마 흡수 파워가 80 W, 160 W, 240 W에서 실험 투입 전력 200 W, 500 W, 1,000 W일 때와 유사한 반경 방향의 플라즈마 밀도 분포를 보였다. 200 W, 500 W, 1,000 W일 때의 전자밀도 분포는 수치 모델링과 전 범위에서 각각 10%, 3%, 2%의 오차를 보였다. 450 mm의 전극에 13.56 MHz의 전력을 인가할 때, 파워가 증가할수록 전자밀도의 최대값의 위치가 웨이퍼 edge에서 중심으로 이동하고 있음을 실험과 모델링을 통해 확인할 수 있었다.

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Regression Model for Estimating Biomass of Natural Pinus densifrola Forests in Northeast Area of Mt. Paekdu (백두산 동북부지역 소나무 천연림 biomass 추정모델)

  • 김영환;이돈구;맹헌우
    • Journal of Korea Foresty Energy
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    • v.17 no.1
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    • pp.23-29
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    • 1998
  • This study was carried out to develop the regression model for estimating biomass of natural Pinus densiflora forests by stand density in northeast Chinese area of Mt. Paekdu. Four allometric regression models(W=aD$^b$, W=a(D$^2$H)$^b$. logW=a+b$\cdot$ logD+cD and logW=a+b$\cdot$log(D$^2$H)+c(D$^2$H)) were used to estimate biomass for each of the tree components. The suitable regression model for estimating biomass of stem, bark and whole tree above ground was logW=a+b$\cdot$log(D$^2$H)+c(D$^2$H), and that for biomass of branch, needle and needle area, logW=a+b$\cdot$logD+cD for all of the stand density classes.

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Design of Low Error Fixed-Width Group CSD Multiplier (저오차 고정길이 그룹 CSD 곱셈기 설계)

  • Kim, Yong-Eun;Cho, Kyung-Ju;Chung, Jin-Gyun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.9
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    • pp.33-38
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    • 2009
  • The group CSD (GCSD) multiplier was recently proposed based on the variation of canonic signed digit (CSD) encoding and partial product sharing. This multiplier provides an efficient design when the multiplications are performed only with a few predetermined coefficients (e.g., FFT). In many DSP applications such as FFT, the (2W-1)-bit product obtained from W-bit multiplicand and W-bit multiplier is quantized to W-bits by eliminating the (W-1) least-significant bits. This paper presents an error compensation method for a fixed-width GCSD multiplier that receives a W-bit input and produces a W-bit product. To efficiently compensate for the quantization error, the encoded signals from the GCSD multiplier are used for the generation of error compensation bias. By Synopsys simulations, it is shown that the proposed method leads to up to 84% reduction in power consumption and up to 79% reduction in area compared with the fixed-width modified Booth multiplier.

THERMAL AND NON-THERMAL RADIO CONTINUUM SOURCES IN THE W51 COMPLEX

  • MOON DAE-SIK;KOO BON-CHUL
    • Journal of The Korean Astronomical Society
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    • v.27 no.1
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    • pp.81-102
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    • 1994
  • We have decomposed the 11-cm radio continuum emission of the W51 complex into thermal and non-thermal components. The distribution of the thermal emission has been determined by analyzing HI, CO, and IRAS $60-{\mu}m$ data. We have found a good correlation between the 11-cm thermal continuum and the 60- 11m emissions, which is used to obtain the thermal and non-thermal 11-cm continuum maps of the W51 complex. Most of the thermal continuum is emanating from the compact H II regions and their low-density ionized envelopes in W51A and W51B. All the H II regions, except G49.1-0.4 in W51B, have associated molecular clumps. The thermal radio continuum fluxes of the compact H II regions are proportional to the CO fluxes of molecular clumps. This is consistent with the previous results that the total mass of stars in an H II region is proportional to the mass of the associated molecular clump. According to our result, there are three non-thermal continuum sources in W51: G49.4-0.4 in W51A, a weak source close to G49.2-0.3 in W51B, and the shell source W51C. The non-thermal flux of G49.5-0.4 at 11-cm is $\~28 Jy$, which is $\~25\%$ of its total 11-cm flux. The radio continuum spectrum between 0.15 and 300 GHz also suggests an excess emission over thermal free-free emission. We show that the excess emission can be described as a non-thermal emission with a spectral index ${\alpha}{\simeq}-1.0 (S_v{\propto}V^a)$ attenuated by thermal free-free absorptions at low-frequencies. The non-thermal source close to G49.2-0.3 is weak $(\~9 Jy)$. The nature of the source is not known and the reality of the non-thermal emission needs to be confirmed. The non~thermal shell source W51C has a 11-cm flux of $\~130Jy$ and a spectral index ${\alpha}{\simeq}-0.26$.

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Isolation and Identification of Bacillus Strains with Antagonistic Properties against Film-forming Yeasts Overgrown in Low Salted Soybean Pastes (저염 장류에서 증식하는 산막 효모에 길항 작용을 갖는 Bacillus 균주의 분리)

  • Jeon, SaeBom;Ryu, MyeongSeon;Kim, Yong Sang;Jo, Seung Wha;Jeong, Do Yeon;Uhm, Tai-Boong
    • Korean Journal of Microbiology
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    • v.49 no.3
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    • pp.286-291
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    • 2013
  • Soybean pastes with 8% (w/w) salinity were prepared instead of soybean paste with 14% (w/w) salinity to meet the growing demands of Korean's low sodium diet. After aging, white films had appeared on the surface of all low-salted soybean pastes [8% (w/w) salinity] unlike high-salted soybean pastes [14% (w/w) salinity]. All of eight microbes isolated from the surface film were identified as Pichia kudriavzevii. Eleven Bacillus strains with good characteristics of fermentation were isolated from traditionally fermented soybean pastes in order to preserve their unique flavors and aromas after aging, and as a result of analyzing the biochemical characteristics and 16S rRNA sequences, those were identified as B. subtilis, B. licheniformis, and B. methylotrophicus. All of the Bacillus isolates had antagonistic activities against 8 isolates of the film-forming yeasts and harbored the genes for synthesis of antimicrobial surfactants including lichenysin and/or surfactin.

DYE PENETRATION AND SURFACE CHANGE OF ROOT CANAL WALL BY Nd : YAG LASER IRRADIATION (Nd:YAG 레이저 조사에 의한 근관벽의 색소 침투도 및 표면 변화에 관한 연구)

  • Lee, Kyoung-Beom;Shin, Dong-Hoon
    • Restorative Dentistry and Endodontics
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    • v.21 no.1
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    • pp.300-310
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    • 1996
  • Recently, there have been attempts to obstruct the dentinal tubules and remove the smear layer by way of laser irradiation in the root canal during endodontic treatment. This treatment was designed to make the root canal to be nonporous. Using 33 extracted single rooted teeth, 30 teeth were divided into 3 groups (10 each), and 3 teeth were used as samples for SEM. Using Nd : YAG laser, the control group was not irradiated, experimental group l(1W group) was irradiated with 1W, 15pps, 15sec., 3 times, 6.7mJ and experimental group 2(3W group) was irradiated with 3W, 15pps, 15sec., 3 times 20mJ. Thereafter the roots were immersed in methylene blue for 8 hours, and the dye infiltration pattern was observed under stereomicroscope and canal wall surface change was observed under SEM. The results are as following ; 1. As a result of evaluating the dye infiltration rate of the apical and middle 1/3, there was significant difference between control group and 1W group, control group and 3W group and there was no significant difference between 1 W group and 3W group. 2. In each group, as a result of comparing the dye infiltration rate of the apical and middle 1/3, there was no significant difference in control and 1W group but significant difference in 3W group. 3. In the control group smear layer was scarecely found and many dentinal tubules were found to be open. 4. In the 1W group, the number of dentinal tubules were decreased and gradual changes of the dentin surface could be seen and 3W group, almost no dentinal tubules could be found and the dentin surface was changed a little more and showed signs of partial fusion.

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Growth Inhibition of Listeria monocytogenes by Weissella spp. from Kimchi Through Real-time PCR (실시간 정량 PCR을 통한 김치 유래 Weissella spp.에 의한 Listeria monocytogenes 생육 억제)

  • Lee, Young-Duck;Kim, Dae-Yong;Park, Jong-Hyun
    • Journal of Food Hygiene and Safety
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    • v.30 no.1
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    • pp.103-108
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    • 2015
  • Weissella spp. from traditional Korean foods of Kimchi were isolated and characterized against food-borne pathogenic Listeria monocytogens. The isolates were identified as W. cibaria 0D17 and W. confusa 0D23 from Kimchi by the biochemical characteristics and 16S DNA sequencing. The culture solutions of the isolates adjusted to pH 7.0 showed L. monocytogens inhibition. To analyze the quantitative detection of L. monocytogenes, real-time PCR was performed according to the SYBR Green I method. The isolates grew well and L. monocytogens did not grow during the co-culture with those strains at $37^{\circ}C$. Therefore, W. cibaria 0D17 and W. confusa 0D23 might be the candidates as the functional lactic acid bacteria for improving food safety.

Development of a Generalized Software for IR Image Generation and Analysis (적외선 영상 생성 및 분석을 위한 종합 소프트웨어 개발)

  • Han, Kuk-Il;Kim, Do-Hwi;Choi, Jun-Hyuk;Ha, Nam-Koo;Jang, Hyun-Sung;Kim, Tae-Kuk
    • KIISE Transactions on Computing Practices
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    • v.23 no.3
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    • pp.141-147
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    • 2017
  • Recently there has been an increasing demand for developing a domestic software (S/W) for infrared signature generation to prevent technology leakage and match the domestic operating environment. In this study, we developed a S/W for infrared signature generation and presented its structures and functions for creating and analyzing the IR images of designated spectral bands. The proposed S/W generates IR images of an object through calculations of surface temperatures and IR signals including the self-emitted, surface reflected and path dependent radiances. Moreover, the proposed S/W includes the features of infrared threat analyses from the generated IR images including the infrared contrast radiant intensity (CRI), detection ranges or detection probability analyses, unlike the imported, commercial infrared signature generation S/W.