• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of Korean Society of Forest Science
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• v.62 no.1
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• pp.87-95
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• 1983

The effects of the pine needle gall midge, Thecodiplosis japonensis, on the growth of the Korean red pine, Pinus densiflora, were examined for the natural forest stands at nine locations: Seocheon-gun, Boryong-gun, and Hongseong-gun in Chooncheongnam-do, where consequence of the infestation had been different. To estimate the economic threshold level of the pine needle gall midge, the growth impacts due to the insect were examined with terminal shoot growth, and cambial growth by analyzing the growth horizontally and vertically. The results obtained are as follows: 1) In general, the growth impacts of the red pine trees were significant for the five consecutive years since damage had occurred, and its maximum retardation was shown in the second and the third years. 2) Simultaneous retardation occurred in both terminal and cambial growth of the tree, probably due to cumulative characteristics of the feeding behaviour. 3) Strong correlation was found between terminal and cambial growth of Korean red pine and this was true for the trees infested by pine needle gall midge. Thus retardation in cambial growth due to the insect may be estimated with that in terminal growth. 4) Infestation was greater on slope facing north than south even though the history of the infestation had been similar. 5) The stem volume of 13-year-old, infested Korean red pine was reduced by more than 75-85%, compared to same aged, uninfected pine in yield table. Thus, much longer period is required to recover the normal growth.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.8
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• pp.877-885
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• 2005

The Froude scaling between the prototype and the model was tried to estimate the necessary ventilation rate for non-isothermal concentrated fume from the semi-closed inner space. Based on the non-dimensional similitude equations derived from the Zukoski plume rise analysis, the scaling experiments were done to verify the relationship of the non-dimensional energy release rate and the non-dimensional mass flow rate by using two different scaled volume models, model A ($1\;m{\times}1\;m{\times}1\;m$) and model B ($0.5\;m{\times}0.5\;m{\times}0.5\;m$). The experimental results showed that the theoretical similitude between the models is acceptable for the prediction of ventilation rate of the concentrated fume. The maximum energy release rate used for the experiments was $20\;kW/m^3$. In the experimental range, the similitude between the energy release rate and the ventilation mass flow rate was well defined and the necessary ventilation rates were 20-30% higher than the stoichiometric ventilation mass flow rate. Based on results of current study, the design of the local air ventilation system can be improved by correcting the effects of buoyancy and diffusion of the non-isothermal concentrated fume.

• Journal of Animal Science and Technology
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• v.44 no.6
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• pp.693-700
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• 2002

The objects of this study were to estimate gene frequencies of the bovine growth hormone(bGH), and to investigate the relationship between the bGH polymorphism and semen characteristics in Hanwoo bull. One hundred nine heads of Hanwoo bulls were used to identify bGH genotypes by the PCR-RFLP, followed by digestion with Alu I restriction enzyme. The frequencies of leucine(Leu) and Valine(Val) alleles were 0.88 and 0.12, respectively. Observed number of LL, LV and VV genotypes were 83, 25 and 1, respectively. Semen characteristics(semen volume, sperm concentration) were analyzed by GH genotypes in 25,559 ejaculates of 109 heads. Although bGH genotypes showed no significant effects on semen characteristics, those of bulls with VV genotype were tended to be lower than those of other bulls with LL or LV genotypes. And, in 1998, total sperm number(60.47${\times}$$10^8$) of VV bulls were significantly lower(P<0.05) than those(86.21${\sim}$92.22${\times}$$10^8$) of other genotypes bulls. This results provide that the VV bull in bGH locus may be worse, under the LL and LV bulls on semen characteristics. However, the number of examined VV bulls was only one and further investigations are needed to confirm the results.

• Journal of Environmental Impact Assessment
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• v.24 no.5
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• pp.420-431
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• 2015

As biodiversity and climate change have become main issues in recent times, the role of the forest ecosystem has been more important and forest conservation has been highlighted. The purpose of this study is to estimate forest area with high conservation values in Gapyung-gun by considering forest ecosystem services. The indicators of biodiversity, climate regulation, and water regulation were selected for assessment in this study. To assess biodiversity, habitat structural features and distribution characteristics of species were analyzed. Climate regulation and water regulation were assessed through analysis of carbon absorption volume and water storage. The result showed that, 50.1% of the forests in Gapyung-gun had high conservation values. The results were verified by comparing them with distribution tendencies of other environmental maps, which represent forest ecological values, and showed similar distribution tendencies. The study was conducted on only Gapyung-gun in Korea; however, the methods used in this study could be utilized for assessment of other areas to identify forests with high conservation values.

• Korean Journal of Agricultural and Forest Meteorology
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• v.9 no.1
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• pp.49-54
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• 2007

The issue of acid precipitation and related environmental problems in East Asia has been emerging. To evaluate the acidity and chemical characteristics of rainwater in Korea, its chemical properties during cultivation season from April to October in 2005 were investigated at Taean. Also, to estimate the contribution of ions on acidity, ion composition characteristics and neutralization effects by cations were determined. The electrical conductivity balance between measured and estimated values showed a high correlation. Rainwater was highly distributed in the range of pH $4.5{\sim}5.0$. The acidity of rainwater was relatively low during the month of June compared with other monitored periods. $Na^+$ was the main cation, followed by $H^+>Ca^{2+}>NH_4^+>K^+>Mg^{2+}$. Among these ions, $Na^+,\;NH_4^+,\;Ca^{2+}$ and $H^+$ comprised over 94% of the total cations. Rainwater anion composition was more than 80% with $SO_4^{2-}$ and $NO_3^-$. In rainwater samples, $NH_4^+$ and $Ca^{2+}$ contributed greatly to neutralizing the rain acidity. The sulfate content decreased until September, and sea salt derivatives were higher in May and October than during other monitored periods. Also, 78% of the soluble sulfate in rainwater was nss-$SO_4^{2-}$ (non-sea salt sulfate).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.11
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• pp.5947-5955
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• 2013

This study was intended to estimate the axial deformation of joint between pavement modules in the rapid-constructible modular pavement system, and to investigate the applicability of two-phase composites for a joint material, which was composed of cement paste, epoxy, or polyurethane as a matrix and sand as particles. A case which had supports under the pavement module as well as a case which the module was put on roadbed directly were considered in FEM analysis for the axial deformation. The effect of self-weight, live load, thermal change, and drying shrinkage were estimated and the thermal change was found to cause the largest deformation compared to the others. Deformation capacity of two-phase composites was predicted using the modified shear-lag model. In the analytical results for the elastic modulus and maximum tensile strain with different volume fractions of sand, 20~30 % replacement of sand was revealed to satisfy the required strain capacity with economy when if the width of joint was designed to be 15~20 mm.

• Journal of Korean Society of Transportation
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• v.29 no.5
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• pp.55-65
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• 2011

In effort to estimate sustainability of the transportation sector, this study conducts a comparative analysis of methodology suggested for measuring greenhouse gas emission. There are two approaches proposed by the UN IPCC: 1) top-down approach (TDA) based on the amount oil sales, and 2) bottom-up approach (BUA) utilizing the velocity of moving source and traffic volume data. The subject areas for analysis were selected based on research results by the Korea Transportation Institute that evaluate traffic sustainability of each local government. Gwacheon-si being one of the top ranked areas in sustainability, and Anseong-si being ranked at the 7th level were analyzed. By the tier 1 methodology, Gwacheon-si and Anseong-si are estimated to create 74,813ton/yr, and 584,125ton/yr of the greenhouse gas emission, respectively. The tier 3 methodology, however, estimates Gwacheon-si and Anseong-si to create 91,462ton/yr, and 163,801ton/yr of the emission, respectively. Comparison of the two estimated emissions shows considerable differences; i.e., the tier 3 method over estimates Gwacheon-si's emission by 22.3% whereas it underestimates Anseong-si's greenhouse gas emission by the factor of about 3.5 compared to the emissions obtained from the tier 1 method. The result from this study implies that the traffic-sustainability-index based grade of each local government can be evaluated differently by the method adopted for measuring greenhouse gas emission.

• Journal of Korean Society of Transportation
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• v.35 no.5
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• pp.423-433
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• 2017

During recent 5 years, it was recorded that 20% of total accident frequency and 30% of total number of death have been occurred due to drowsy driving. Drowsy driving accident is result from the loss of driving ability due to driver's accumulated fatigue. Continuous driving time can be measured as a surrogate variable to quantify the level of fatigue. The main purpose of this research is to investigate statistical correlation between the proportion of continuous driving vehicle (more than 2 hours) and the number of drowsy accidents. To carry this out, continuous driving time was measured using GPS route-guidance trajectory data. Also, accident frequency, traffic volume and segment length were collected to estimate safety performance function (SPF) for Jungbunearuk expressway in Korea. Through various types of estimated SPFs, statistical correlation was analyzed based on estimated statistical indices. This research can provide theoretical background for enforcement to regulate commercial vehicle driver's continuous driving time. In addition, throughout the trajectory data expansion, it is expected that strategy for anti-drowsy driving facilities installation can be established based on the suggested methodology.

• Journal of the Korean Geotechnical Society
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• v.28 no.4
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• pp.91-100
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• 2012

Soil-water characteristic curves (SWCCs), which represent a physical property in partially saturated soils, show the relation between volumetric water content and matric suction. The SWCCs exhibit hysteresis during wetting and drying, however experimental expressions used to describe SWCCs have generally ignored the hysteresis. In addition, the shape of SWCC may depend on the void ratio which is changed by soil skeleton deformations or hysteretic behavior under various loading conditions. Hence, it is necessary to understand, both empirically and analytically, the relationship between soil skeleton deformations and the SWCCs of various soils. The typical SWCCs experimentally have drying, wetting, and the second drying curve. The measurement of a complete set of hysteretic curves is severely time-consuming and difficult works, then the first drying curve of SWCC is generally determined to estimate the hydraulic conductivity and shear strength function of partially saturated soils. This paper presents the hydraulic-mechanical behavior of partially saturated soils (weathered soil and silty soil) for volume changes and hysteresis in SWCCs regarding the difference between the first drying and wetting curve.