• 제목/요약/키워드: vibration velocity

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반도체 웨이퍼 제조공정 클린룸 구조, 공기조화 및 오염제어시스템 (Clean Room Structure, Air Conditioning and Contamination Control Systems in the Semiconductor Fabrication Process)

  • 최광민;이지은;조귀영;김관식;조수헌
    • 한국산업보건학회지
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    • 제25권2호
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    • pp.202-210
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    • 2015
  • Objectives: The purpose of this study was to examine clean room(C/R) structure, air conditioning and contamination control systems and to provide basic information for identifying a correlation between the semiconductor work environment and workers' disease. Methods: This study was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. The C/R structure and air conditioning method were investigated using basic engineering data from documentation for C/R construction. Furthermore, contamination parameters such as airborne particles, temperature, humidity, acids, ammonia, organic compounds, and vibration in the C/R were based on the International Technology Roadmap for Semiconductors(ITRS). The properties of contamination control systems and the current status of monitoring of various contaminants in the C/R were investigated. Results: 200 mm and 300 mm wafer fabrication facilities were divided into fab(C/R) and sub fab(Plenum), and fab, clean sub fab and facility sub fab, respectively. Fresh air(FA) is supplied in the plenum or clean sub fab by the outdoor air handling unit system which purifies outdoor air. FA supply or contaminated indoor air ventilation rates in the 200 mm and 300 mm wafer fabrication facilities are approximately 10-25%. Furthermore, semiconductor clean rooms strictly controlled airborne particles(${\leq}1,000{\sharp}/ft^3$), temperature($23{\pm}0.5^{\circ}C$), humidity($45{\pm}5%$), air velocity(0.4 m/s), air change(60-80 cycles/hr), vibration(${\leq}1cm/s^2$), and differential pressure(atmospheric pressure$+1.0-2.5mmH_2O$) through air handling and contamination control systems. In addition, acids, alkali and ozone are managed at less than internal criteria by chemical filters. Conclusions: Semiconductor clean rooms can be a pleasant environment for workers as well as semiconductor devices. However, based on the precautionary principle, it may be necessary to continuously improve semiconductor processes and the work environment.

다양한 도구의 적용이 뒤넙다리근의 뻣뻣함과 근 긴장도에 미치는 영향 (The Effect of Applying Various Tools to the Stiffness and Muscle Tone of Hamstring Muscles)

  • 황성현;김태호
    • 대한통합의학회지
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    • 제8권4호
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    • pp.223-230
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    • 2020
  • Purpose : The purpose of this study was to examine the effects of tools (i., extracorporeal shock wave therapy, massage gun, and foam roller) on range of motion, muscle tone and pain threshold among patients with hamstring stiffness. Methods : Fourteen participants with hamstrings stiffness were recruited. Interventions were performed 6 times, and each session was for 30 seconds using the three tools. The range of motion, muscle tone, and pain threshold were measured. The order of the use of the three tools was randomly determined. The foam roller was made to move from the bottom of the hip crease to the upper part of the back of the hamstring. Additionally, velocity 5 vibration stimulation was performed on the hamstring using a massage gun. Moreover, vibration stimulation was performed on the hamstring with extracorporeal shock wave therapy 5 minutes, 5 Hz, and 1,500 strokes. The flexibility of the posterior thigh muscle was based on maintaining the knee and hip joints in a 90 ° bend in the supine position. The joint angle of the knee was measured, when the knee was actively extended, at the maximum point where the posterior thigh muscle was stretched. The elasticity of the posterior thigh muscle was measured while the subject was prone and in a relaxed state without any force. Measurements were made at the muscle abdominal area of the semitendinosus muscle of the posterior femur, and the area to be measured was marked with a pen. The measurement of the tenderness threshold of the posterior femur was measured using a tenderness meter(Commander Algometer, J-Tech, USA). The force value at the point at which the pressure sensation change to pain was measured after applying vertical pressure to the posterior femur muscle, which was the halfway point between the ischial tuberosity and the popliteal surface of the subject lying on their stomach. Results : The extracorporeal shock wave therapy increased stiffness and, muscle tone, and caused changes in the pain threshold, whereas the other two tools had no effect on these indices. Conclusion : Extracorporeal shock wave therapy has important effects on range of motion and muscle stiffness and can be used in warmup protocols.

고출력 압전 디바이스 응용을 위한 PZ-PT-PMN계 압전 세라믹의 특성 (The Characteristics of PZ-PT-PWN Piezoelectric Ceramics for Application to High Power Device)

  • 정수현;홍종국;이종섭;채홍인;윤만순;임기조
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권3호
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    • pp.155-160
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    • 2000
  • The piezoelectric properties and the doping effect for$0.95Pb(Zr_xTi_{1-x})O_3+0.05Pb(Mn1/3Nb2/3)O_3$ compositions were studied. Also, the heat generation and the change of electromechanical characteristics, the important problem in practical usage, were investigated under high electric field driving. As a experiment results under low electric field, the values of kp and $\varepsilon33T$ were maximized, but Qm was minimized(Kp=0.57, Qm=1550) in the composition of x=0.51. In order to increase the values of Qm $Nb_2O_5$ was used as a dopant. As the result of that, the grain size was suppressed and the uniformity of grain was improved. Also, the values of kp decreased, and the values of Qm increased with doping concentration of $Nb_2O_5$. As a experiment results under high electric field driving, when vibration velocity was lower than 0.6[m/s], the temperature increase was $20[^{\circ}C]$, and the change ratio of mechanical quality factor was less than 10[%]. So, its electromechanical characteristics was very stable. Conclusively, piezoelectric ceramic composition investigated at this paper is suitable for application to high power piezoelectric devices.

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Study on Following of Parmeter ${\alpha}$ of 2-DOF PID Controller Using Fuzzy Algorithm

  • Lee, Sang-Min;Cho, Yong-Sung;Park, Jong-Oh;Choo, Yeon-Gyu;Lim, Young-Do
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2003년도 ICCAS
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    • pp.307-311
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    • 2003
  • 2-mass system is generally used as controller of the variable-speed to transfer electromotion power to mechanical load such as industrial robot, driving parts of electric vehicle, rolling machine system of steel plant and driving parts of elevator. In this case, PI controller is often used as a velocity controller because of simplicity of system. But PI control algorithm is not enough for obtaining the control characteristics required for this system. To solve this problem, 2-mass system based on the PID controller derives the optimum PID parameters by pole assignment and estimation of the ITAE performance index. In this case, the system have tenacious properties about disturbance, but it causes extreme overshoot and vibration because of rapidly output of controller in early transient response about desired value. And if speed control system is applied by 2-DOF parameter ${\alpha}$, a temporary value, we must induce most suitable parameter by complicate pole assignment and estimation of the ITAE performance index whenever ${\alpha}$ changes. In this paper, to solve this problem we suggest control algorithm to followed exactly value of ${\alpha}$ as 2-DOF parameter by using fuzzy algorithm . So, intelligence algorithm modeled by human knowledge, experience, teachability and judgment follow exact ${\alpha}$ value and it can compose the efficient 2-DOF PID controller to improve following performance, overshoot decrease.

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매설배관 내의 압축성 유체 누설 위치 검출에 관한 연구 (A Study on the Compressible Fluid Leak Position Detection of Buried Pipelines)

  • 이정한;김형진;윤두병;박진호
    • 한국가스학회지
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    • 제20권5호
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    • pp.40-49
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    • 2016
  • 지하 매설배관을 이용한 유체 수송 중 임의의 배관 위치에서 누설이 발생할 경우 육안 식별의 어려움으로 진동 센서 등을 이용하여 누설 위치를 탐지한다. 이러한 누설 위치 검출 시스템은 물과 같은 비 압축성 유체를 대상으로 센서 간의 신호 도달 시간차와 음파의 전파속도를 이용하여 검출하고 있다. 본 논문에서는 가스와 같은 압축성 유체의 누설 검출을 위한 시스템을 개발하고자 기존 검출 방법을 검토하고, 온도와 압력을 고려한 압축성 유체의 전파속도 식을 개선하고 압축 공기를 이용한 실험 장치를 구축하여 실험 수행을 통해 검증하였다. 검증 결과 매설배관 내 압축성 유체의 누설 위치 검출이 가능함을 확인하였으며, 가스 수송용 매설배관 내 누설 위치 검출 시스템 개발에 적용 가능함을 확인하였다.

풍력 블레이드의 결빙에 의한 공력특성 및 성능 변화 (Atmospheric Icing Effects on the Aerodynamic Characteristics and Performance of Wind Turbine Blade)

  • 박지호;명노신
    • 한국항공우주학회지
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    • 제42권2호
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    • pp.134-143
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    • 2014
  • 추운 기후에서 운영되는 풍력터빈 시스템의 표면에 발생한 결빙으로 인하여 공기역학적 성능이 크게 저하될 수 있다. 이러한 결빙은 양력감소 및 항력증가를 야기하고, 발전효율에 부정적인 영향을 미치게 된다. 이로 인하여 풍력발전기의 성능저하 또는 과부하, 무게중심의 변화에 따른 과도진동, 결빙파편이 지상으로 떨어질 경우의 안전성 문제, 계기의 결빙으로 인한 계기 측정오차, 최악의 경우 풍력 시스템 정지 등의 문제가 발생한다. 본 연구에서는 결빙증식이 풍력 발전기의 공력특성에 미치는 영향을 CFD 기법을 이용해 분석하였다. 또한 결빙증식 결과를 바탕으로 BEM 기법을 적용시켜 삼차원 블레이드에 대한 공력성능을 계산하였다. 결빙의 두께는 상대적인 속도차이에 의해 블레이드 중심에서 끝단으로 갈수록 증가함을 알 수 있었고, 공기의 속도가 결빙증식에 미치는 주요 인자임을 확인하였다.

자기장에 따른 자기유변탄성체의 스틱 슬립 현상 연구 (Stick-slip Characteristics of Magnetorheological Elastomer under Magnetic Fields)

  • 연성룡;이광희;김철현;이철희;최종명
    • Tribology and Lubricants
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    • 제31권1호
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    • pp.6-12
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    • 2015
  • This paper investigates the stick-slip characteristic of magnetorheological elastomer (MRE) between an aluminum plate and the surface of the MRE. MRE is a smart material and it can change its mechanical behavior with the interior iron particles under the influence of an applied magnetic field. Stick-slip is a movement of two surfaces relative to each other that proceeds as a series of jerks caused by alternate sticking from friction and sliding when the friction is overcome by an applied force. This special tribology phenomenon can lead to unnecessary wear, vibration, noise, and reduced service life of work piece. The stick-slip phenomenon is avoided as far as possible in the field of mechanical engineering. As this phenomenon is a function of material property, applied load, and velocity, it can be controlled using the characteristics of MRE. MRE as a soft smart material, whose mechanical properties such as modulus and stiffness can be changed via the strength of an external magnetic field, has been widely studied as a prospective replacement for general rubber in the mechanical domain. In this study, friction force is measured under different loads, speed, and magnetic field strength. From the test results, it is confirmed that the stick-slip phenomenon can be minimized under optimum conditions and can be applied in various mechanical components.

회전식 수리저항성능 실험기를 이용한 지반의 수리저항특성과 전기비저항 특성의 상관관계 (Relationship between Electrical Resistivity and Hydraulic Resistance Capacity measured by Rotating Cylinder Test)

  • 김영상;정신현
    • 한국해안·해양공학회논문집
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    • 제27권1호
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    • pp.1-8
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    • 2015
  • 우리나라 남서해안은 풍력발전에 최적지로 평가받고 있으며 최근 해상풍력 구조물을 포함하는 해안구조물의 건설이 증가하고 있다. 그러나 우리나라 남서해안의 조차는 3~8 m까지 발생하여 남서해안에 설치되는 풍력기초들은 횡방향력과 조류의 다방향 흐름에 의한 세굴로 전체 구조물에 예상치 못한 진동에 의한 불안정성이 야기될 수 있다. 이 연구에서는 회전식 수리저항성능 실험기를 이용하여 인공지반시료의 수리저항성능을 평가하였으며 전기비저항 측정결과와 비교하여 수리저항성능과 전기비저항 특성과의 상관관계에 대한 연구를 진행하였다. 실험결과 일방향 한계전단응력과 양방향 한계전단응력을 상한계와 하한계로 표시하고 전기비저항 특성과 상관관계를 도시하면 조립토와 세립토가 비교적 명확히 구분되고 한계전단응력과의 상관관계 도출이 가능한 것으로 나타났다.

Trajectory Studies of Methyl Radical Reaction with Iodine Molecule

  • Lee, Sang-Kwon;Ree, Jong-Baik;Kim, Yoo-Hang;Shin, Hyung-Kyu
    • Bulletin of the Korean Chemical Society
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    • 제26권9호
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    • pp.1369-1380
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    • 2005
  • The reaction of methyl radical with iodine molecule on an attractive potential energy surface is studied by classical trajectory procedures. The reaction occurs over a wide range of impact parameters with the majority of reactive events occurring in the backward rebound region on a subpicosecond scale. A small fraction of reactive events take place in the forward hemisphere on a longer time scale. The ensemble average of reaction times is 0.36 ps. The occurrence of reactive events is strongly favored when the incident radical and the target molecule align in the neighborhood of collinear geometry. Since the rotational velocity of I2 is slow, the preferential occurrence of reactive events at the collinear configuration of $CH_3{\ldots}I{\ldots}$I leads to the reaction exhibiting an anisotropic dependence on the orientation of $I_2$. During the collision, there is a rapid flow of energy from the $H_3C{\ldots}$I interaction to the I-I bond. The $CH_3I$ translation and $H_3C$-I vibration share nearly all the energy released in the reaction, and the distribution of the vibrational energy is statistical. The reaction probability is $\cong$0.4 at the $CH_3$ and I2 temperatures maintained at 1000 K and 300 K, respectively. The probability is weakly dependent on the $CH_3\;and\;I_2$ temperatures between 300 K and 1500 K.

이산 웨이블릿 변환과 Unscented 파티클 필터를 이용한 GPS-INS 결합 시스템의 실외 정밀 위치 추정 (Precise Outdoor Localization of a GPS-INS Integration System Using Discrete Wavelet Transforms and Unscented Particle Filter)

  • 서원교;이장명
    • 전자공학회논문지SC
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    • 제48권6호
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    • pp.82-90
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    • 2011
  • 본 논문에서는 실외 정밀 위치 추정을 위하여 설계된 GPS(Global positioning system)-INS(Inertial navigation system) 결합 시스템의 잡음 필터링 기법과 데이터 결합을 위한 기법을 소개한다. 실외 이동 항체의 속도 변화에 따라 차등적으로 발생하는 INS의 잡음들을 이산 웨이블릿 변환을 통해 신호를 분석하고 발생하는 잡음들을 데이터의 왜곡을 최소화하며 제거할 수 있는 차등 임계화 기법을 통한 필터링 기법을 제안하였다. 이는 항체의 가/감/등속을 고려하지 않고 특정 로우/하이 필터를 적용하여 데이터의 왜곡이 일어나는 기존 필터링 기법을 개선한 것이다. 또한 UPF를 이용해 비선형 특성과, 비가우시안 잡음의 특성을 가지는 실외 이동 항체의 GPS와 INS의 결합시킴으로서 실외에서 정밀하게 위치를 추정할 수 있게 하였고 이를 설계하여 실험을 통해 성능을 분석하였다.