• 통합자연과학논문집
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• 제6권4호
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• pp.215-219
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• 2013

In this study, in order to investigate how consecutive treatments of glass surface with HF acid and water vapor/Ar plasma affect the quality of 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM), poly(3,4-ethylenedioxythiophene) (PEDOT) thin films were vapor phase-polymerized immediately after spin coating of FeCl3 and poly-urethane diol-mixed oxidant solution on the monolayer surfaces prepared at various treatment conditions. For the film characterization, various poweful tools were used, e.g., FE-SEM, an optical microscope, four point probe, and a contact angle analyzer. The characterization revealed that a well prepared APS-SAM on a glass surface treated with water vapor/Ar plasma is very useful for uniform coating of FeCl3 and DUDO mixed oxidant solution, regardless of HF treatment. On the other hand, a bare glass surface without APS-SAM but treated with HF and water vapor/Ar plasma generally led to a very poor oxidant film. As a result, PEDOT films vapor phase-polymerized on APS-SAM surfaces are far superior to those on bare glass surfaces in the quality and electrical characteristics aspects.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2006년도 추계학술발표대회 및 제11회 신소재 심포지엄
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• pp.18.2-18.2
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• 2006

• 통합자연과학논문집
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• 제6권4호
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• pp.211-214
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• 2013

In this study, in order to investigate how consecutive treatments of glass surface with HF acid and water vapor/Ar plasma affect the quality of 3-aminopropyltriethoxysilane self-assembled monolayer (APS-SAM), poly(3,4-ethylenedioxythiophene) (PEDOT) thin films were vapor phase-polymerized immediately after spin coating of FeCl3 and poly-urethane diol-mixed oxidant solution on the monolayer surfaces prepared at various treatment conditions. For the film characterization, various poweful tools were used, e.g., FE-SEM, an optical microscope, four point probe, and a contact angle analyzer. The characterization revealed that HF treatment is not desirable for the synthesis of a high quality PEDOT thin film via vapor phase polymerization method. Rather, sole treatment with plasma noticeably improved the quality of APS-SAM on glass surface. As a result, a highly dense and smooth PEDOT thin film was grown on uniform oxidant film-coated APS monolayer surface.

• 멤브레인
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• 제23권3호
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• pp.237-244
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• 2013

수증기 투과는 용이하게 하면서 Dimethyl methylphosphonate (DMMP)에 대한 방호성능을 부여하는 선택투과성능을 가지도록 고안된 몇가지 복합막을 제조하였다. 선택투과막 재료는 폴리비닐알코올 고분자를 기반으로 염기성 작용기를 가지는 기능성 고분자를 포함하도록 하였다. 이들 재료를 사용하여 화생방호성능을 보유한 차세대 소재로서의 가능성을 확인하기 위하여 선택투과능을 평가하였다. 시험한 결과, 폴리비닐알코올/폴리에틸렌이민 소재가 우수한 수증기 투과성능($2,200{\sim}2,900g/m^2/day$) 및 DMMP 증기 방호성능($47g/m^2/day$)을 가지는 것을 확인하였다.

• 통합자연과학논문집
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• 제4권4호
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• pp.294-297
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• 2011

Quality of PEDOT electrode thin film vapor phase-polymerized on 3-aminopropyltriethoxysilane (APS) self-assembled monolayer (SAM) is very crucial for making an ohmic contact between electrode and semiconductor layer of an organic transistor. In order to improve the quality of PEDOT film, the quality of APS-SAM laying underneath the film must be in the best condition. In this study, in order to improve the quality of APS-SAM, the monolayer was self-assembled on $SiO_2$ surface by a dip-coating method under strictly controlled relative humidity (< 18%RH). The quality of APS-SAM and PEDOT thin film were investigated with a contact angle analyzer, AFM, FE-SEM, and four-point probe. The investigation showed that a PEDOT film grown on the humidity-controlled SAM is very smooth and compact (sheet resistivity = 20.2 Ohm/sq) while a film grown under the uncontrolled condition is nearly amorphous and contains quite many pores (sheet resistivity = 200 Ohm/sq). Therefore, this study clearly proves that a highly improved quality of APSSAM can offer a highly conductive PEDOT electrode thin film on it.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1582-1584
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• 2008

This paper reports a simple fabrication method for creating the superhydrophobic polymer surface using a plasma etching. Generally, it is necessary for the superhydrophobic surfaces to have a rough structure on surface with the composition of the low surface energy. In this study, Poly(methyl methacrylate) (PMMA), poly(ethylene terephthalate) (PET), acrylonitrile butadiene styrene (ABS) with superhydrophobic surface were fabricated using $O_2$ plasma etching and vapor deposition with the fluoroalkylsilane self-assembled monolayers. The plasma treated polymer surfaces are covered with the nano-pillar shaped structures after treatment for $1{\sim}2min$. And these samples with FOTS SAMs coating are showed the superhydrophobicity having the water contact angle of around $150^{\circ}$ and sometimes around $180^{\circ}$ depending on the treatment time. Furthermore the nanostructured polymer is transparent for the visible light.

• 한국환경과학회지
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• 제15권7호
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• pp.695-699
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• 2006

This study is to investigate the relationship between pore structures of activated carbons and adsorption characteristics of toluene vapor using dynamic adsorption method. The surface areas of below $10{\AA}$ in the pore diameter of activated carbons used in this experiment were in the range of 72 -93 % of total cumulative surface area and the toluene vapor equilibrium adsorption capacities were in the range of 350 - 390mg/g. Activated carbons having larger toluene adsorption capacity than the compared activated carbons had relatively pores in the pore diameter range of $7-10{\AA}$. Linear relationship between equilibrium adsorption capacity and cumulative sur- face area was in the diameter range of over $7{\AA}$. It was thought that toluene vapor was relatively well adsorbed on surfaces of pores of over $7{\AA}$.

• 한국군사과학기술학회지
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• 제16권4호
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• pp.560-565
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• 2013

Biological decontamination means the removal of microorganisms from the inanimate object such as building or equipment. In this study, hydrogen peroxide vapor efficacy test using VHP 1000ED system(Steris LifeSciences) were conducted for G. stearothermophilus spore with agent materials(aluminum, stainless steel, poly-carbonate, viton, silicone, kapton and glass). Total recovered spores exposed to hydrogen peroxide vapor(1.0 g/min) during 7, 15, 30, 60 min were calculated. As a result, all agent materials were totally decontaminated within 60 min at 1.0 g/min concentration with 35% hydrogen peroxide vapor. Finally, we could confirmed that hydrogen peroxide vapor possess sporicidal capacity of G. stearothermophilus and found the optimum decontamination conditions with VHP1000ED system.

• 한국식품과학회지
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• 제21권2호
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• pp.235-237
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• 1989

플라스틱 필름의 투습도 측정장치를 제작하여 전자투습도 측정장치로 필름의 투습도를 측정해 본 결과 두 측정 장치간에는 5% 수준(P<0.05)에서 유의차가 없었다. 따라서 제작한 투습도 측정장치를 산업에 활용할 수 있을 것으로 판단되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.56-56
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• 2009

반도체 device가 점점 고집적화, 다층화 되면서 막질의 평탄화를 위한 CMP (chemical mechanical planarization) 공정은 반도체 제작 공정에서 필수 요건이 되었다. 특히 pad conditioning은 CMP 공정 중, 막질의 제거율과 균일도를 유지시키기 위한 중요한 공정이다. 하지만, conditioner를 장시간 사용할 경우 slurry residue와 같은 잔류 오염물질들이 conditioner의 표면의 오염을 유발할 수 있고 이로 인해 conditioner의 수명이 단축되거나 웨이퍼 표면에 결함을 유발할 수도 있다. 본 연구에서는 이를 방지하기 위해 vapor SAM을 이용하여 Ni conditioner 표면에 소수성 박막을 증착하여 오염여부를 평가해 보았다. 먼저, Ni wafer를 이용하여 증착 온도와 압력에 따라 소수성 박막을 증착하여 표면특성을 평가해 보았다. 증착전과 후에 Ni wafer 표면의 접촉각은 contact angle analyzer (Phoenix 400, SEO, Korea)를 이용하여 측정하였다. 박막 표면 형상과 거칠기는 AFM (XE-100, PSIA, Korea)를 이용하여 평가되었고 묘면 성분 분석을 위해 FT-IR (Nicolet 6700, Thermo Scientific, USA)이 사용되었다. SEM (S-4800, Hitach, Japan)은 박막 증착 전과 후의 conditioner를 이용하여 실제 conditioning후 conditioner 표면의 particle 오염정도를 관찰하기 위해 사용되었다. 또한, conditioner 표면에 실제 오염되어있는 particle 개수를 평가하기 위해 particle size analyzer (Accusizer 780A, Particle Sizing Systems Co., USA)을 사용하였다. 본 실험을 통해 최적 증착 조건을 확립하였으며 실제 conditioner 표면에 소수성 박막을 증착 후 $100^{\circ}$ 이상의 높은 contact angle을 확인할 수 있었다. 또한, 소수성 박막이 증착된 conditioner의 경우 실제 conditioning후 표면 particle 오염이 현저히 감소되었음을 확인할 수 있었다.