• 한국결정학회:학술대회논문집
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• 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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• pp.5-6
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• 2002

The new spectrometer for X-ray Induced Electron Emission Spectroscopy (XIEES) .has been recently developed in KRISS in collaboration with PTI (Russia). The spectrometer allows to perform research using the XAFS, SXAFS, XANES techniques (D.C.Koningsberger and R.Prins, 1988) as well as the number of techniques from XIEES field(L.A.Bakaleinikov et all, 1992). The experiments may be carried out with registration of transmitted through the sample x-rays (to investigate bulk samples) or/and total electron yield (TEY) from the sample surface that gives the high (down to several atomic mono-layers in soft x-ray region) near surface sensitivity. The combination of these methods together give the possibility to obtain a quantitative information on elemental composition, chemical state, atomic structure for powder samples and solids, including non-crystalline materials (the long range order is not required). The optical design of spectrometer is made according to Johannesson true focusing schematics and presented on the Fig.1. Five stepping motors are used to maintain the focusing condition during the photon energy scan (crystal angle, crystal position along rail, sample goniometer rail angle, sample goniometer position along rail and sample goniometer angle relatively of rail). All movements can be done independently and simultaneously that speeds up the setting of photon energy and allows the using of crystals with different Rowland radil. At present six curved crystals with different d-values and one flat synthetic multilayer are installed on revolver-type monochromator. This arrangement allows the wide range of x-rays from 100 eV up to 25 keV to be obtained. Another 4 stepping motors set exit slit width, sample angle, channeltron position and x-ray detector position. The differential pumping allows to unite vacuum chambers of spectrometer and x-ray generator avoiding the absorption of soft x-rays on Be foil of a window and in atmosphere. Another feature of vacuum system is separation of walls of vacuum chamber (which are deformed by the atmospheric pressure) from optical elements of spectrometer. This warrantees that the optical elements are precisely positioned. The detecting system of the spectrometer consists of two proportional counters, one scintillating detector and one channeltron detector. First proportional counter can be used as I/sub 0/-detector in transmission mode or by measuring the fluorescence from exit slit edge. The last installation can be used to measure the reference data (that is necessary in XANES measurements), in this case the reference sample is installed on slit knife edge. The second proportional counter measures the intensity of x-rays transmitted through the sample. The scintillating detector is used in the same way but on the air for the hard x-rays and for alignment purposes. Total electron yield from the sample is measured by channeltron. The spectrometer is fully controlled by special software that gives the high flexibility and reliability in carrying out of the experiments. Fig.2 and fig.3 present the typical XAFS spectra measured with spectrometer.

• Composites Research
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• 제27권4호
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• pp.146-151
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• 2014

본 연구에서는 분극 전계에 따른 압전 페인트 센서의 특성을 확인하기 위해 충격힘과 분극 전계를 변화시켜 가면서 실험적인 연구를 수행하였다. 페인트 센서 제작을 위해 유연 압전 재료인 $Pb(Ni_{1/3}Nb_{2/3})O_3-Pb(Zr, Ti)O_2$ (PNN-PZT) 파우더와 경화제를 포함하고 있는 에폭시 수지를 중량비 1:1로 혼합 후 몰드를 사용하여 $40{\times}10{\times}1mm^3$ 크기를 같는 시편을 제작 하였다. 이후 시편의 기공을 제거하기 위해 진공 데시케이터를 사용하였다. 분극 작업을 위해 시편의 전극은 실버페이스트를 윗면과 아랫면에 바르고 하루 동안 건조시켜 제작하였다. 분극 작업은 온도는 상온으로, 분극 시간은 30분으로 고정하고 분극 전계를 달리하여 진행되었다. 1 mm의 두께를 갖는 앞전 페인트센서를 제작하여 실험에 사용하였으며, 감도 측정 및 감도 변화는 충격 망치를 사용하여 시편에 충격을 가했을 때 압전 페인트에서 출력되는 전압과 충격 망치에서 출력되는 전압을 측정 후 신호처리 하여 비교하였다. 그 결과 압전 페인트의 민감도에 분극 전계가 미치는 영향에 대해 평가 하였고 그 결과를 기술하였다.

• 한국자기학회지
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• 제17권4호
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• pp.156-161
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• 2007

어레이(away) 자성센서 개발을 위해 고진공 스퍼터링 증착장비를 이용하여 스펙큘러형(specular type) Glass/Ta(5)/NiFe(7)/IrMn(10)/NiFe(5)/$O_2$/CoFe(5)/Cu(2.6)/CoFe(5)/$O_2$/NiFe(7)/Ta(5)(nm) 거대자기저항-스핀밸브(giant magnetoresistive-spin valves; CMR-SV)박막을 제작하였다. 다층박막 시료를 $20{\times}80{\mu}m^2$의 미세 활성영역을 가진 15개 어레이를 $8{\times}8mm^2$ 영역 내에 최적화한 제작 조건으로 광 리소그래피 패터닝 하였다. Cu를 증착하여 만든 2단자 전극법으로 측정한 자성특성은 15개 모든 소자들이 균일한 자기저항특성을 나타내었고, 5 Oe 근방에서 가장 민감한 자기저항비 자장민감도와 출력전압들은 각각 0.5%/Oe, ${\triangle}$V: 3.9 mV이었다. 형상자기이방성이 적용된 상부 자유층 $CoFe/O_2/NiFe$층은 하부 고정 자성층 $IrMn/NiFe/O_2/CoFe$층 자화 용이축과 직교하였다. 측정시 인가전류 값을 각각 1 mA에서 10 mA까지 인가하였을 때 출력 작동 전압 값은 균일하게 증가하였으며, 자장감응도도 거의 일정하여 미세 외부자장에 민감한 나노자성소자로서 좋은 특성을 띠었다.

• Applied Science and Convergence Technology
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• 제24권5호
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• pp.196-202
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• 2015

Human blood consists of 55% of plasma and 45% of blood cells such as white blood cell (WBC) and red blood cell (RBC). In plasma, there are many kinds of promising biomarkers, which can be used for the diagnosis of various diseases and biological analysis. For diagnostic tools such as a lab-on-a-chip (LOC), blood plasma separation is a fundamental step for accomplishing a high performance in the detection of a disease. Highly efficient separators can increase the sensitivity and selectivity of biosensors and reduce diagnostic time. In order to achieve a higher yield in blood plasma separation, we propose a novel fluid wing structure that is optimized by COMSOL simulations by varying the fluidic channel width and the angle of the bifurcation. The fluid wing structure is inspired by the inertial particle separator system in helicopters where sand particles are prevented from following the air flow to an engine. The structure is ameliorated in order to satisfy biological and fluidic requirements at the micro scale to achieve high plasma yield and separation efficiency. In this study, we fabricated the fluid wing structure for the efficient microfluidic blood plasma separation. The high plasma yield of 67% is achieved with a channel width of $20{\mu}m$ in the fabricated fluidic chip and the result was not affected by the angle of the bifurcation.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2182-2186
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• 2003

This paper presents the differential type resonant accelerometer (DRXL) and its performance test results. The DRXL is the INS grade, surface micro-machined sensor. The proposed DRXL device produces a differential digital output upon an applied acceleration, and the principle is a gap-dependent electrical stiffness variation of the electrostatic resonator with torsion beam structures. Using this new operating concept, we designed, fabricated and tested the proposed device. The final device was fabricated by using the wafer level vacuum packaging process. To test the performance of the DRXL, a nonlinear self-oscillation loop is designed using describing function technique. The oscillation loop is implemented using discrete electronic elements. The performance test of the DRXL shows that the sensitivity of the accelerometer is 12 Hz/g and its long term bias stability is about $2mg(1{\sigma})$. The turn on repeatability, bandwidth, and dynamic range are 4.38 mg, 100 Hz, and ${\pm}\;70g$, respectively.

• 한국전기전자재료학회논문지
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• 제25권5호
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• pp.366-371
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• 2012

In this paper, fabricated by MEMS uncooled micro-bolometer detector for the study in the infrared sensitivity enhancement. Absorption layer SiOx-Metal series MDTF (metal-dielectric thin film) by high absorption rate and has a high thermal coefficient of resistance, low noise characteristics were implemented. Then MDTF were made in a vacuum deposition method. And MDTF for the analysis of the physical properties of silicon wafers were fabricated, TCR (temperature coefficient of resistance) value was made in order to measure the glass wafer and FT-IR (Fourier Transform Infrared spectroscopy) values were made in order to measure the germanium window. The analyzed results of MDTF -3 [%/K] has more characteristics of the TCR. And 8~12 um wavelength region close to 70% in the absorption characteristic.

• 대한전자공학회논문지
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• 제25권11호
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• pp.1315-1322
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• 1988

$SnO_X$/Pt 薄膜형 가스感知素子의 製造하고 그 특성을 결정하였다. $SnO_X$/Pt 薄膜은 $SnO_2$에 Pt를 重量比로 2% 섞은 표적을 電子량 加熱승치法으로 形成하였다. 素子의 전도도는 온도의존성을 보였고, CO 가스에 대한 感度는 2000 ppm 이하의 낮은 농도범위에서 가스농도는 평방근에 비례하였다. 최적동작온도는 약 300$^{\circ}$C 였고 CO 가스농도가 5000 ppm에서의 응답시간은 약 20초 였다.

• 대한화학회지
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• 제17권5호
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• pp.353-356
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• 1973

광물안의 기체불순물에 관한 연구는 특이한 파괴분석법(질량분석계를 사용)에 의하여 발전되어 왔다. 시료의 분쇠는 영구용 질량분석계의 고진공내에서 텅크스텐 카아바이드(tungsten carbide)로된 분쇠기로 행하여 졌다. 사용한 질량분석계의 측정감도는 표준상태에서 약 $10^{-10}cc$였다. 이 보문은 미국 죠지아주 라보니아 부근에서 채집된 석류석에 대한 위의 분석법에 의한 기체조성의 확인 및 결정을 보고하는 것이며 그 조성들은 $N_2$, $H_2$, $O_2$, $H_{2}O$, $CO_2$, CO, $CH_4$등이 있다.

• 대한화학회지
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• 제40권12호
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• pp.719-723
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• 1996

고체표면의 비점유 전자에너지 상태를 연구하고자 역광전자분광기를 제작하고 시험하였다. 이 분광기는 초고진공 챔버속에 전자총과 광검출기로 구성되어 있다. 전자총은 궤도 시뮬레이션과 전류 측정을 통해 좋은 집속도와 높은 전류밀도를 가지고 있음을 알 수 있었다. 이 분광기의 전체적인 분해능은 0.74 eV이고, 광검출기의 감도는 약 10 counts/$sec{\cdot}{\mu}A$이다. 하나의 결과로서 Ge(111) 시료의 역광전자분광 스펙트럼은 이론적인 계산결과와 잘 일치하였다.

• Journal of Magnetics
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• 제14권1호
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• pp.18-22
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• 2009

The shape anisotropy effect of a giant magnetoresistance-spin valves (GMR-SV) device with a glass/NiO/NiFe/CoFe/Cu/CoFe/NiFe layered structure for use in the detection of magnetic property of molecules within a cell was investigated. The patterned device was given uniaxial anisotropy during the sputtering deposition and vacuum post-annealing, which was performed at $200^{\circ}C$ under a 300 Oe magnetic field. The pattern size of the device, which was prepared through the photolithography process, was $2{\times}15\;{\mu}m^2$. The experimental results confirmed that the best design for a GMR-SV device to be used as a biosensor is to have both the axis sensing current and the easy axis of the pinned NiO/NiFe/CoFe triple layer oriented in the direction of the device's width, while the easy axis of the free CoFe/NiFe bilayer should be pointed along the long axis of the device.