Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the MDTF for Uncooled Infrared Ray Thermal Image Sensors with High Thermal Coefficient of Resistance

높은 열저항 계수를 가지는 비냉각형 적외선 열영상 이미지 센서용 MDTF(Metal-dielectric Thin Film)에 관한 연구

  • Received : 2012.03.15
  • Accepted : 2012.03.26
  • Published : 2012.05.01
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Abstract

In this paper, fabricated by MEMS uncooled micro-bolometer detector for the study in the infrared sensitivity enhancement. Absorption layer SiOx-Metal series MDTF (metal-dielectric thin film) by high absorption rate and has a high thermal coefficient of resistance, low noise characteristics were implemented. Then MDTF were made in a vacuum deposition method. And MDTF for the analysis of the physical properties of silicon wafers were fabricated, TCR (temperature coefficient of resistance) value was made in order to measure the glass wafer and FT-IR (Fourier Transform Infrared spectroscopy) values were made in order to measure the germanium window. The analyzed results of MDTF -3 [%/K] has more characteristics of the TCR. And 8~12 um wavelength region close to 70% in the absorption characteristic.

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References

  1. S. J. Hwang, A. Shin, H. H. Shin, and M. Y. Sung, Proc. IEEE ISIE, 2788 (2006).
  2. J. L. Tissot, J. P. Chatard, and E. Mottin, Proc. SPIE Infrared Technology and Applications, 4820, 220 (2002).
  3. R. A. Wood, Proc. SPIE, 2020, 322 (1993).
  4. W. Radford, D. Murphy, A. Finch, A. Kennedy, J. Kojiro, M. Ray, and R. Wyles, Proc. SPIE, 3379, 22 (1998).
  5. K. Hashimoto, H. Xu, T. Mukaigawa, R. Kubo, H. Zhu, M. Noda, and M. Okuyama, Sensor. Actuat., A88, 10 (2001).