• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1537-1541
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• 2003

In this paper, presented is a feedback control performance of vibratory gyroscope at various vacuum levels. Micro gyroscope, whose operation is based on the vibrating motion at the vacuum conditions, is highly influenced by the vacuum level of the operating circumstances. In general, we apply the feedback control scheme to the gyroscope in order to improve the performances of the sensor. And control performances of the gyroscope are related to those vacuum levels. So we need investigate the performances of the closed loop control at various vacuum conditions comparing with those of the open loop. The experimental results show that the sensitivity of the closed loop is less than that of the open loop especially in low vacuum conditions. Therefore, there should be trade-off between sensitivity and other sensor performances such as linearity, bandwidth when we apply feedback control to the gyroscope.

• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.409-415
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• 2011

The method to improve the detection sensitivity of Hand-held XRF (X-Ray Fluorescence) device currently being developed is discussed. To minimize the loss of the intensity due to atmospheric gas molecules, the vacuum module, which can be filled with atmospheric or He gas, between the sample and the detector was installed. And the change of the detection sensitivity was measured in a vacuum and in the He gas-filled state. As a result, the following three important results were obtained; Firstly, XRF intensity was increased 2~4 times in the low energy range (3~4 keV). It is a very important result because the enhancement of the detection sensitivity means shortening of the detection time in Hand-held XRF device. Secondly, the possibility of detection of the elements less than 3 keV in emission energy was confirmed. Thirdly, the absorption by atmospheric gas molecules can be minimized without vacuum- sealed vessel in Hand-held XRF device, if the vacuum module filled with He gas is used. We concluded that all of three results are very meaningful in the development of a Hand-held XRF device.

• Proceedings of the Korean Vacuum Society Conference
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• 1995.02a
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• pp.116-116
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• 1995

• Membrane and Water Treatment
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• v.9 no.6
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• pp.435-445
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• 2018

In this work, desalination experiments were performed on vacuum membrane distillation (VMD). Process parameters such as feed flow rate, vacuum degree on permeate side, feed bulk temperature and feed salt concentration were optimized using sensitivity analysis and Taguchi method. The optimum values of process parameters were found to be 2 lpm of feed flow rate, $60^{\circ}C$ of feed bulk temperature, 5.5 kPa of permeate-side pressure and 5000 ppm of salt concentration. The permeate flux at these conditions was obtained as $26.6kg/m^2{\cdot}hr$. The rejection of salt in permeate was found to be 99.7%. The percent contribution of various process parameters using ANOVA results indicated that the most important parameter is feed bulk temperature with its contribution of 95%. The ANOVA results indicate that the percent contribution of permeate pressure gets increased to 5.384% in the range of 2 to 7 kPa as compared to 0.045% in the range of 5.5 to 7 kPa.

• Journal of Power System Engineering
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• v.13 no.6
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• pp.110-116
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• 2009

In the present study, we proposed a simulation model of vacuum booster with AMESIM software to predict the output characteristic. And we performed the sensitivity analysis of output characteristic with main design parameters, such as diaphragm diameter. All of these parameters are main design parameters in the procedure of vacuum booster design. The simulation results of this paper offer qualitative information of vacuum booster output. Therefore, the simulation results of this paper will be used effectively for the design procedure of vacuum booster in the industrial field.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.104.2-104.2
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• 2013

A residual gas analyzer (RGA) system has been developed in this laboratory. Characteristics of the RGA system parts such as ion source, quadrupole mass filter and sensitivity are introduced. Some efforts have been made to improve performance of the two types of ion sources, open ion source (OIS) and closed ion source (CIS). A metal mesh was placed onto the electron beam entrance of the CIS anode tube to block the filament field penetration. Sensitivity of the CIS ion sources with and without the mesh was compared by mass spectra of SF6 gas (97% He base) introduced into the CIS anode through a needle valve. About ten-times improvement in the RGA sensitivity was observed for the CIS with the mesh in the electron entrance. Computer simulation showed an axi-symmetric anode potential distribution and improved focusing of the electron beam inside the anode tube with the mesh.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.213.1-213.1
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• 2015

Field effect transistors (FETs)를 기반으로 한 바이오센서는 빠른 응답속도, 저비용, label-free 등을 이유로 각광받고 있다. 그러나 3D 구조를 기반으로 한 FETs 바이오센서의 낮은 sensitivity의 한계점을 지니며, 이를 극복하기 위해 1D 구조의 나노튜브 등을 활용하였으나 여전히 높은 sensitivity의 확보는 힘들다. 최근에는 이러한 문제점을 극복하기 위해 이차원 반도체 물질 중 하나인 Transition metal dichalcogenide (TMD)를 이용하여, 700 이상의 sensitivity를 지니는 pH센서 및 100 이상의 sensitivity를 지니는 바이오센서가 보고되었다. 하지만 이보다 더 높은 정확성 및 반응성을 높이기 위한 연구는 부족한 실정이다. 우리는 DNA 템플릿을 이용하여, TMD FET 기반 pH 및 바이오센서의 반응성을 극대화시키는 연구를 선보인다. DNA는 7~8정도의 유전상수 (K)를 가지는 물질로 기존 $SiO_2$(K=3.9)보다 높은 유전상수를 가지며 두께를 0.7 nm로 매우 얇게 형성할 수 있는 장점이 있다. 이는 FET 기반 바이오센서의 표면 캐패시턴스를 높여 sensitivity를 극대화할 수 있으며, 기존에 사용된 high-k 기반 바이오센서와 비교하여도 약 10배 이상의 sensitivity 향상을 노릴 수 있다. 또한, TMD 물질로 우리는 $WSe_2$를 선택하였으며, pH 용액의 receptor로써 우리는 3-Aminopropyltriethoxysilane (APTES)를 활용하였고, 템플릿으로 사용된 DNA는 DX tile 및 Ring type의 두 가지를 사용하였다. 추가로, DNA의 phosphate backbone을 중성화시키고 DNA의 base pairing의 charge 안정화를 위해 구리 이온($Cu^{2+}$) 및 란타넘족($Tb^{3+}$)을 추가하였다. 완성된 바이오센서의 pH 센싱을 위해 우리는 pH 6,7,8의 표준 용액을 사용하였으며, 재현성 및 반복성의 확인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.363.2-363.2
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• 2016

Stretchable strain sensors are becoming essential in diverse future applications, such as human motion detection, soft robotics, and various biomedical devices. One of the well-known approaches for fabricating stretchable strain sensors is to embed conductive nanomaterials such as metal nanowires/nanoparticles, graphene, conducting polymer and carbon nanotubes (CNTs) within an elastomeric substrate. Among various conducting nanomaterials, CNTs have been considered as important and promising candidate materials for stretchable strain sensors owing to their high electrical conductivity and excellent mechanical properties. In the past decades, CNT-based strain sensors with high stretchability or sensitivity have been developed. However, CNT-based strain sensors which show both high stretchability and sensitivity have not been reported. Herein, highly stretchable and sensitive strain sensors were fabricated by integrating single-walled carbon nanotubes (SWNTs) and nylon textiles via vacuum-assisted spray-layer-by-layer process. Our strain sensors had high sensitivity with 100 % tensile strain (gauge factor ~ 100). Cyclic tests confirmed that our strain sensors showed very robust and reliable characteristic. Moreover, our SWNTs-based strain sensors were easily and successfully integrated on human finger and knee to detect bending and walking motion. Our approach presented here might be route to preparing highly stretchable and sensitive strain sensors with providing new opportunity to realize practical wearable devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.153-153
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• 2012

Endpoint detection with plasma impedance monitoring and self-plasma optical emission spectroscopy is demonstrated for dielectric layers etching processes. For in-situ detecting endpoint, optical-emission spectroscopy (OES) is used for in-situ endpoint detection for plasma etching. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. To overcome these problems, the endpoint was determined by impedance signal variation from I-V monitoring (VI probe) and self-plasma optical emission spectroscopy. In addition, modified principal component analysis was applied to enhance sensitivity for small area etching. As a result, the sensitivity of this method is increased about twice better than that of OES. From plasma impedance monitoring and self-plasma optical emission spectroscopy, properties of plasma and chamber are analyzed, and real-time endpoint detection is achieved.

• Journal of the Korean Society for Heat Treatment
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• v.25 no.5
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• pp.239-243
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• 2012

$SnO_2$ thin films were prepared on the Si substrate by radio frequency (RF) magnetron sputtering and then post deposition vacuum annealed to investigate the effect of annealing temperature on the structural properties and hydrogen gas sensitivity of the films. The films that annealed at $300^{\circ}C$ show the higher sensitivity than the other films annealed at $150^{\circ}C$. From atomic force microscope observation, it is supposed that post deposition annealing promotes the rough surface and also, increase gas sensitivity of $SnO_2$ films for hydrogen gas. These results suggest that the vacuum annealed $SnO_2$ thin films at optimized temperatures are promising for practical high-performance hydrogen gas sensors.