• Journal of information and communication convergence engineering
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• v.15 no.4
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• pp.232-236
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• 2017

A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

• Land and Housing Review
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• v.2 no.2
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• pp.163-170
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• 2011

Individual Vacuum Pressure Method (IVPM) is a soft ground improvement technique, in which a vacuum pressure can be directly applied to the vertical drain board to promote consolidation and to strengthen the soft ground. This method does not require surcharge loads, different to embankment or pre-loading method. In this study, the ground improvement efficiency of Individual Vacuum Pressure Method was estimated when suction pressure increases step by step(-20, -40, -60, -80kPa) with different periods. During Individual Vacuum Pressure Method process, surface settlement and pore pressure were monitored, and cone resistance as well as water content were also measured after the completion of Individual Vacuum Pressure Method treatment. From the results, optimum duration of each step of vacuum pressure was determined, and the settlement was calculated using FEM numerical analysis.

• Vacuum Magazine
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• v.1 no.1
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• pp.11-16
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• 2014

A variety of metal vacuum systems displays the celebrated 1/t pressure, namely, power-law dependence on time t, with the exponent close to unity, as to the origin of which there has been long-standing controversy. Here we propose a chemisorption model for water adsorbates, based on the argument for 2D fermion behavior of water adsorbed on a metal surface, and obtain analytically the power-law behavior of pressure with an exponent unity. Further, the model predicts that the pressure should depend on the temperature T according to $T^{1.5}$, which is indeed confirmed by our experiment.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2001.11a
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• pp.45-49
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• 2001

To maintain the freshness of produce, because of stand away between produced and consumer, we need refrigeration system that can supply to consumer at cold chain as soon as gathering. General refrigeration system consist of refrigeration chamber or low temperature store. But the vacuum technology can rapidly refrigeration without refrigerator. This precool system possible to get low precooled temperature, suitable for the fishes, the meat, the vegetables, the fruit etc. Especially get advantage that quality maintain through rapid refrigeration of ferment directly generate heat. Vacuum precool system's principle is that water saturated temperature reduce according to pressure is get to vacuum area, so product temperature reduce as water evaporation at product. In vacuum suction, unit, on early experiment period run the rotary type vacuum pump at purpose pressure, then maintain pressure by water-diven ejector. As the results, cabbage took about 60 minutes to reach from $23.2^{\circ}C$ to $4.5^{\circ}C$at 5mgHg abs.

• Journal of the Korean Society for Railway
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• v.13 no.5
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• pp.516-520
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• 2010

Parametric study has been conducted to calculate the capacity of vacuum pump system that will be used to maintain the pressure of the tube structure under atmosphere level. Recently many railroad researchers pay attention to the tube train system as one of the super high speed transportation system. To achieve the super high speed, the inside of tube system should be maintained at low pressure level. In the low pressure environment, it is well known that air resistance of train is drastically decreased. Vacuum pump system will be used to make low pressure state for tube structure, exhaust the leakage air and supplement additional vacuum pumping. As results of these studies, we get the lump capacity of vacuum pump for various parameters. These results can be applied to analyze the effects of the reduction of air resistance.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3134-3138
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• 2007

The objective of this paper is to elucidate the characteristic performance of the mini-vacuum pump with various heights of eccentric shaft. The mini-diaphragm pump is composed of DC motor, eccentric shaft and diaphragm and it is operated by PCB panel. The height of eccentric shaft is changed that controls the quantities of air flow to improve the performance of vacuum pressure. This device is manufactured in order to embody the vacuum pressure with 200 mmHg. The heights of eccentric shaft which is used in present experiment are located in the range from 3 mm to 5.5 mm. The vacuum pressure distributions with each height of eccentric shaft was measured and the results were graphically depicted.

• Journal of Korean Vacuum Science & Technology
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• v.6 no.3
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• pp.109-115
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• 2002

This paper describes a CCM key comparison of low absolute-pressure standards at seven National Measurement Institutes that was carried out during the period March 1998 to September 1999 in order to determine their degrees of equivalence at pressures in the range 1 Pa to 1000 Pa. The Korea Research Institutes of Standards and Science(KRISS) participated from 10 Pa to 1000 Pa pressure range in 1999. The primary standards, which represent two principal measurement methods, included five liquid-column manometers and four static expansion systems. The transfer standard package consisted of four high-precision pressure transducers, two capacitance diaphragm gauges to provide high resolution at low pressures, and two resonant silicon gauges to provide the required calibration stability.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• ETRI Journal
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• v.38 no.4
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• 한국연소학회:학술대회논문집
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• 2003.12a
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• pp.109-113
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• 2003

Low pressure or vacuum carburizing(LPC) has undergone major further developments since 1980 and now it has achieved industrial maturity. The advantage of low pressure vacuum carburizing over gas carburizing is not only the creation of surface entirely free of oxide and environmentally friendly but also a reduction in batch times, lower gas and energy consumption and the prevention of soot. In this study the experiment was carried out to investigate the effects of vacuum atmosphere in the heating furnace. Heat transfer rate and uniformity of temperatures of test samples in the pressure range of a few 0.1torr was examined on a test charge of 100kg. It is found that the fuel saving rate due to decreasing heating time reach to 20% in the vacuum heating mode as compared with atmospheric heating mode. Also the uniformity of temperatures in the samples was improved significantly in the vacuum heating mode. Also the effects of the RC fan for stirring atmosphere inside furnace was examined. Results shows RC fan appears to provide a reasonable tool for improving uniformity of temperature in the atmospheric heating mode.