• Journal of the Korean Institute of Gas
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• v.28 no.3
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• pp.1-9
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• 2024

In this study, various technologies were analyzed to suppress the occurrence of leak due to the difference in heat shrinkage of vacuum container parts. Based on these technologies, a study was conducted on the development of vacuum leakage detection technology for cryogenic containers using helium leak detectors. In addition, a study on vacuum leakage detection using a helium leak detector was conducted to accurately detect the site where a cryogenic container leak occurs. Finally, a vacuum leak detection procedure was established based on the leak detection experiment for the cryogenic container in which the actual leak occurred using a helium leak detector, and it was confirmed that various tests can be conducted depending on the test subject conditions.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.235-243
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• 2007

Nowadays, in our country, large vacuum chambers for huge experimental facilities such as the tokamak fusion device, high power neural beam test stand, and space simulator have been constructed. In such a vacuum chamber of very large size, it is quite complicate to check on leakage quantitatively, while the probability of a leak is relatively high. To investigate the feasibility of applying reliably a helium leak detection to the huge vacuum chambers, and to find a reasonable methodology of choosing an optimum set-up for leak detection, several virtual constructions of the leak detection system have been analyzed by calculating the pressure distribution in the system and the helium level in the sensor part.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.77-83
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• 2015

Many welding processes are performed to construct cryogenic system. Leak-tight for the cryogenic system is required at low temperature environment. Helium leak detection techniques are commonly used to find leak for the cryogenic system. The helium leak detection techniques for spraying, sniffing and pressurizing techniques are introduced. High vacuum is also necessary to use helium leak detector. So, types of fluid flow, effective temperature, conductance and pumping speed are introduced for vacuum pumping. Leak test procedure is shown for pipe welding, cryomodule and low temperature test. Cryogenic seals which include copper gasket, helicoflex gasket and indium are investigated.

• Journal of the Korean Society for Nondestructive Testing
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• v.13 no.3
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• pp.31-38
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• 1993

The storage ring vacuum system for the Pohang Light Source (PLS) has been designed to maintain the vacuum pressure of $10^{-10}Torr$ which requires UHV welding to have helium leak rate less than $1{\times}10^{-10}Torr{\cdot}{\ell}/sec$. In order to develop new technique (PLS) welding technique), a prototype vacuum chamber has been welded by using Tungsten Inert Gas welding method and all the welded joints have been tested with a non-destructive method, so called helium leak detection, to investigate the vacuum tightness of the weld joints. The test was performed with a detection limit of $1{\times}10^{-10}Torr{\cdot}{\ell}/sec$ for helium and no detectable leaks were found for all the welded joints. Thus the performance of welding technique is proven to meet the criteria of helium leak rate required in the PLS Storage Ring. Both the principle and the procedure for the helium leak detection are also discussed.

• Vacuum Magazine
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• v.3 no.4
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• pp.41-46
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• 2016

자동차 생산에 필요한 진공 기술들을 누설 탐지 관점에서 먼저 살펴 보고, 누설 탐지가 필요한 차량 부품들과 해당 부품들에 적용되는 누설량(leak rate)을 알아 보자. 후반부에는 차량 연료 증발로 인해 발생하는 연료 누설 탐지와 차량을 정지시키는데 필요한 제동력을 진공을 이용하여 얻을 수 있는 진공 부스터(vacuum booster)를 매우 간략하게 설명하도록 한다.

• The KSFM Journal of Fluid Machinery
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• v.19 no.4
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• pp.39-42
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• 2016

A PFA lined ball valve, which is machined with fluorinated resin PFA to its inner part for improving corrosion resistance, non-stickness, heat-resistance, has been widely used to the chemical/pharmaceutical industries, the semiconductor/LCD manufacturing processes, etc. with the high purity chemicals as working fluid. EPA stated that 60% of all fugitive emissions come from the valve stem packing in a typical petroleum or chemical processing plant. They monitor regulated components for leaks and maintain seal performance at acceptable levels. Korean industrial standards only deals with the bubble test for in-line leakage of valves, which has the detectable leak rate of $10^{-4}$ [$mbar{\cdot}L{\cdot}s^{-1}$], therefore, it is not sufficient to check fugitive emissions. In this study, we conducted Helium leak detection from a PFA lined ball valve and evaluated fugitive emissions according to ISO 15848-1, which has the detectable leak rate of $10^{-9}$ [$mbar{\cdot}L{\cdot}s^{-1}$], for manufacturing the high-reliable PFA lined ball valves against fugitive emissions.

• Applied Science and Convergence Technology
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• v.25 no.3
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• pp.47-50
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• 2016

Low temperature test for half-wave resonator (HWR) cryomodule is performed at the superfluid helium temperature of 2 K. The effective temperature is defined for non-uniform temperature distribution. Helium leak detection techniques are introduced for cryogenic system. Experimental set up is shown to make the low temperature test for the HWR cryomodule. The cooldown procedure of the HWR cryomodule is shown from room temperature to 2 K. The cryomodules is precooled with liquid nitrogen and then liquid helium is supplied to the helium reservoirs and cavities. The pressure of cavity and chamber are monitored as a function of time. The vacuum pressure of the cryomodule is not increased at 2 K, which shows leak-tight in the superfluid helium environment. Static heat load is also measured for the cryomodule at 2.5 K.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.257-257
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• 2012

Fault detection was carried out in a etcher of capacitive coupled plasma with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and Fluorocarbon plasma with variable change such as pressure and addition of N2 and O2 to assume atmospheric leak, RF power and pressure that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by VI probe was analyzed by statistical method including PCA to determine healthy of process. The main goal of this study is to find feasibility and limitation of OES and Impedances for fault detection by shift of plasma characteristics and to enhance capability of fault detection using PCA.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.499-499
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• 2012

This study was evaluated on etcher of capacitive coupled plasmas with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and C4F8 plasma with variable change such as pressure and addition of gas (Atmospheric Leak: N2 and O2), RF, pressure, that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by Vi probe was analyzed by statistical method to determine healthy of process. The main goal of this study is to understand unwanted tool performance to eventually improve productive capability. It is important for process engineers to actively adjust tool parameter before any serious problem occurs.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.331-331
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• 2010

반도체 제조, 디스플레이 산업 등의 진공공정에서 잔류기체의 종류와 양에 대한 관심이 높아지면서 사용이 쉽고 높은 정확도를 가지는 사중극 질량 분석기(QMS)가 널리 쓰이고 있다. 특히 고진공으로 내려가면서 리크디텍션(leak detection)과 미세량의 잔류기체 감지가 더욱더 요구된다. 그중에서도 진공공정에서의 수소 가스를 감지하는 것은 매우 중요하므로 $H_2$/Ar 혼합가스를 이용하여 미세농도의 수소를 측정하였다. 측정하려는 가스를 부피확장 방법으로 가스챔버로 희석하여 이동시키고 핀홀에서 가스유량을 더 줄여서 QMS가 기체를 감지하는 압력범위를 유지하면서 측정하였다. 미세량의 수소기체를 감지하기 위해 이온소스의 emission current, Ion ref. voltage, cathode voltage의 변수를 조절하여 QMS를 최적화 하였으며, 그 결과 수십 ppm 농도까지 측정이 가능하다.