Electric Characteristics of $HfO_$2 deposited by Atomic Layer Deposition

• Kim, Su-Hyeon;Park, Jae-Gyeong;No, Yong-Han
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.169-169
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  • 2008
• PDF

Characteristics of a-plane GaN buffer layers on r-plane sapphire substrate grown by metal-organic chemical vapor deposition

• Song, Hu-Yeong;Kim, Eun-Gyu;Kim, Jae-Beom;Hwang, Seong-Min
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.125-125
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  • 2008
• PDF

New Concept Deposition System : Growth of Amorphous and Microcrystalline Si prepared by CVD at low Temperature

• No, Yong-Seok;Choe, Dae-Gyu;Myeong, Jae-Min
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.331-331
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  • 2008
• PDF

Developments of Nanocomposite Systems Prepared by Aerosol Deposition Method

• Park, Jae-HYuk;Jun, Akedo
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.47-47
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  • 2008
• PDF

Deposition sequence dependent variation of interface chemical reaction between 8-hydroxyquinolatolithium and Al

• Lee, Yeong-Mi;Park, Yong-Seop;Lee, Yeon-Jin;Kim, Jeong-Won
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.258-258
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  • 2008
• PDF

Zinc oxide nanowire growth on various substrates using VLS mechanism and thermal chemical vapor deposition

• Hong, Hyeon-Gi;Son, Jeong-In;Kim, Yeon-Su;Lee, Seong-Hun
• • Proceedings of the Korean Vacuum Society Conference
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  • 2002.06a
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  • pp.118-118
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  • 2002
• PDF

Synthesis of ${\beta}-SiC$ nanowires by Catalytic Chemical Vapor Deposition

• Kim, Hwa-Young;Park, Jeung-Hee
• • Proceedings of the Korean Vacuum Society Conference
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  • 2002.02a
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  • pp.207-207
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  • 2002
• PDF

PARTICULARITIES OF FILM COMPOSITION AND STRUCTURE FORMATION DURING PUKSED LASER DEPOSITION

• Shaginyan, L.R.;Han, Jeon-G.
• • Proceedings of the Korean Vacuum Society Conference
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  • 2002.02a
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  • pp.127-127
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  • 2002
• PDF

전구체 노출 시간을 조절하는 원자층 증착(Atomic Layer Deposition) 기술

• Sin, Ung-Cheol;Ryu, Sang-Uk;Seong, Nak-Jin;Yun, Sun-Gil
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.08a
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  • pp.247-247
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  • 2007
• PDF

Plasma anisotropic deposition of copper in trenches of nm scale

• Koga, Kazunori;Shiratani, Masaharu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2007.08a
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  • pp.71-71
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  • 2007
• PDF

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