Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.08a
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- Pages.71-71
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- 2007
Plasma anisotropic deposition of copper in trenches of nm scale
- Koga, Kazunori (Graduate School of Information Science & Electrical Engineering, Kyushu University) ;
- Shiratani, Masaharu (Graduate School of Information Science & Electrical Engineering, Kyushu University)
- Published : 2007.08.15
Abstract
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