Characteristics of Nanolithography Process on Polymer Thin-film using Near-field Scanning Optical Microscope (근접장현미경을 이용한 폴리머박막 나노리쏘그라피 공정의 특성분석)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2004.10a
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- pp.590-595
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- 2004