• Title/Summary/Keyword: ultrasonic process

검색결과 674건 처리시간 0.028초

초음파 기술을 이용한 실리콘 이방성 식각 공정에서의 표면 평탄화 향상 연구 (Surface Flatness Improvement in Si Anisotropy Etching Process Utilizing Ultrasonic Wave Technology)

  • 윤의중;김좌연;이강원;이석태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.416-417
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    • 2005
  • In this study, we optimized the process of Si anisotropy etching by combing tetramethyl ammonium hydroxide (TMAH) etching process with ultrasonic wave technology. New ultrasonic TMAH etching apparatus was developed and it was used for fabricating a $20{\mu}m$ thick diaphragm for Si piezoresistive pressure sensors. Based on comparison study on etch rate and surface flatness, it was observed that the Si anisotropy etching methode with new ultrasonic TMAH etching apparatus (at 40 kHz/ 500 watt) was superior to conventional etching methods with TMAH or TMAH+ammonium persulfate(AP) solutions.

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자동회귀-이동평균(ARMA) 모델에 의한 초음파 진동 절삭 공정의 해석 (An analysis of cutting process with ultrasonic vibration by ARMA model)

  • I.H. Choe;Kim, J.D.
    • 한국정밀공학회지
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    • 제11권2호
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    • pp.85-94
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    • 1994
  • The cutting mechanism of ultrasonic vibration machining is characterized as two phases, that is, an impact at the cutting edge and a reduction of cutting force due to non-contact interval between tool and workpiece. In this paper, in order to identify cutting dynamics of a system with ultrasonically vibrated cutting tool, an ARMA modeling is performed on experimental cutting force signals which have a dominant effect on cutting dynamics. The aim of this study is, through Dynamic Date System methodology, to find the inherent characteristics of an ultrasonic vibration cutting process by considering natural frequency and damping coefficient. Surface roughness and stability of cutting process under ultrasonic vibration are also considered

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Box-Behnken법을 이용한 E. coli 소독에서 전기-UV-초음파 복합 공정의 최적화 (Optimization of Electro-UV-Ultrasonic Complex Process for E. coli Disinfection using Box-Behnken Experiment)

  • 김동석;박영식
    • 대한환경공학회지
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    • 제33권3호
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    • pp.149-156
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    • 2011
  • 수중에서 E. coli 소독을 위한 전기-UV-초음파 복합 공정에 대해 실험계획법과 반응표면분석법(RSM)을 적용하였다. 2차반응표면 모형식을 추정할 수 있는 Box-Behnken법을 이용하여 전기-UV-초음파 복합 공정의 소독 반응에서 전기분해($X_1$), UV ($X_2$), 및 초음파 공정($X_3$)의 전력을 독립변수로 선정하여 수학적으로 모형화하였다. 소독 후 잔류 E. coli 수와 독립변수 사이의 실험에서 독립변수에 대해 다음의 모형식이 얻어졌다. 잔류 E. coli number (Ln CFU) = 23.69 - 3.75 Electrolysis - 0.67 UV - 0.26 Ultrasonic - 0.16 Electrolysis UV + 0.05 Electrolysis Ultrasonic + 0.27 $Electrolysis^2$ + 0.14 $UV^2$ - 0.01 $Ultrasonic^2$). 예측된 모형식은 실험 자료와 잘 일치하였다($R^2$ = 0.983). 2차원 등고선도와 3차원 반응표면도가 잔류 E. coli 수에 대한 최적 범위를 구하기 위하여 사용되었다. Design-Expert 소프트웨어의 '수치 최적화'를 이용하여 잔류 E. coli 수에 대한 최적 값을 찾은 결과 1.47 Ln CFU/L이었고, 최적 조건은 전기분해 6.94 W, UV 6.72 W 및 초음파 공정 14.23 W로 나타났다. 본 연구는 반응표면분석법이 복합 소독 공정에서 잔류 E. coli 수를 최소화하고 운전 조건을 최적화하기 위한 적절한 방법 중의 하나라는 것을 보여주었다.

초음파 금속용접 시 다층 퍼셉트론 뉴럴 네트워크를 이용한 용접품질의 In-process 모니터링 (In-process Weld Quality Monitoring by the Multi-layer Perceptron Neural Network in Ultrasonic Metal Welding)

  • ;박동삼
    • 한국기계가공학회지
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    • 제21권6호
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    • pp.89-97
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    • 2022
  • Ultrasonic metal welding has been widely used for joining lithium-ion battery tabs. Weld quality monitoring has been an important issue in lithium-ion battery manufacturing. This study focuses on the weld quality monitoring in ultrasonic metal welding with the longitudinal-torsional vibration mode horn developed newly. As the quality of ultrasonic welding depends on welding parameters like pressure, time, and amplitude, the suitable values of these parameters were selected for experimentation. The welds were tested via tensile testing machine and weld strengths were investigated. The dataset collected for performance test was used to train the multi-layer perceptron neural network. The three layer neural network was used for the study and the optimum number of neurons in the first and second hidden layers were selected based on performances of each models. The best models were selected for the horn and then tested to see their performances on an unseen dataset. The neural network models for the longitudinal-torsional mode horn attained test accuracy of 90%. This result implies that proposed models has potential for the weld quality monitoring.

초음파 처리조의 구조에 따른 살균효과 연구 (Research on Ultrasonic Sterilization Effect of Treatment Equipments)

  • 이양래;김현세;백민혁
    • 한국생산제조학회지
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    • 제22권5호
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    • pp.818-823
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    • 2013
  • In the process of sterilization during the manufacture of beverages, both the treatment time and the temperature influence the beverage taste and flavor. Therefore, to improve the beverage quality, a nonthermal sterilization method is preferred to a high-temperature one. A nonthermal method, ultrasonic treatment by shock waves from cavitation, has been known to have a sterilizing effect. In this study, to observe the effect of ultrasonic frequency and treatment time on beverage quality, batch type ultrasonic equipment was fabricated and tested. Further, to evaluate the applicability of this ultrasonic method to an in-situ process, flow type ultrasonic heptagonal equipment was fabricated and then used to perform a sterilization experiment. Subsequently, the sterilizing effect was measured under ultrasonic and low-temperature ($55^{\circ}C$) treatments. Based on the obtained results, ultrasonic sterilization technology that can be applied for treatments at flow rates of up to 3 L/min was developed.

유류오염토양의 복원을 위한 초음파 토양세척 공정의 최적화에 대한 연구 (Investigation for Optimization of Ultrasonic Soil-Washing Process for Remediation of Diesel Contaminated Soil)

  • 박범국;손영규;황안나;김지형
    • 한국방재학회 논문집
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    • 제11권1호
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    • pp.101-105
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    • 2011
  • 본 연구는 초음파를 이용한 토양세척 공정에서 주파수를 결정하고 그 조건에서 공정을 최적화 하기 위한 실험적 접근 방법에 대한 연구이다. 초음파 주파수는 35, 72, 100 kHz를 적용하여 최적 주파수를 결정하였다. 최적 토양 세척 조건을 위한 실험 설계는 $MINITAB^{(R)}$ 프로그램을 이용하였다. 실험은 초음파의 적용, 물리적 교반의 적용, 계면활성제의 적용의 세 가지와 각각의 조합이 적용되었다. 실험 결과 초음파의 최적 주파수는 35 kHz로 확인되었다. 높은 주파수에서 초음파의 공동화 기포 개수가 많아 효과가 좋을 것으로 예상되지만, 낮은 주파수에서 높은 에너지를 가진 공동화 기포가 더 효과적이다고 설명할 수 있다. 그러나, 실제 공정에 적용하기 위해서는 유입되는 에너지에 대한 고려를 해야 한다. 통계적 요인실험설계법에 의해 설계된 실험 결과를 적용한 결과, 초음파와 물리적 교반에 의한 영향이 가장 큰 것으로 나타났다. 그러므로 실제 공정을 위해서는 이 두 가지 공정에 대한 실내 실험이 필요할 것으로 보인다.

초음파에 의한 고 세장비 유리가공 특성 (Characteristics of High-Aspect-Ratio Ultrasonic Machining of Glass)

  • 신용주;김헌영;장인배;김병희;전병희
    • 소성∙가공
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    • 제11권7호
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    • pp.608-613
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    • 2002
  • An ultrasonic machining process is efficient and economical means for precision machining of glass and ceramic materials. However, the mechanism of the process with respect to the crack initiation and propagation and the stress development in the ceramic workpiece subsurface arc still not well understood. In this research, we have investigated the basic mechanism of ultrasonic machining of ultrasonic machining of glass by the experimental approach. For this purpose, we designed and fabricated the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load control system. During machining experiments, the effects of abrasive characteristics and machining conditions on the surface roughness and the material removal rate are measured and compared.

CFRP의 섬유강화재 배향성에 따른 레이저유도초음파 신호특성 평가 (Evaluation of Laser-based Ultrasonic Signals due to Fiber Orientation of CFRP)

  • 최상우;이준현;변준형;서경철
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2004년도 춘계학술발표대회 논문집
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    • pp.143-146
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    • 2004
  • Fiber reinforced plastic material should be inspected in fabrication process in order to enhance quality by prevent defects such as delamination and void. Generally, ultrasonic technique is widely used to evaluate FRP. In conventional ultrasonic techniques, transducer should be contacted on FRP. However, conventional contacting method could not be applied in fabrication process and novel non-contact evaluating technique was required. Laser-based ultrasonic technique was tried to evaluate FRP plate. Laser-based ultrasonic waves propagated on CFRP were received with various transducers such as accelerometer and AE sensor in order to evaluated the properties of waves due to the variation of frequency. Velocities of laser-based ultrasonic waves were evaluated for various fiber orientation.

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초음파가 얼음과 파라핀 용해에 미치는 영향에 관한 실험적 연구 (A Experimental Study on the Ultrasonic Influence for Melting the Paraffin the Ice)

  • 이재효;김태훈
    • 설비공학논문집
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    • 제13권11호
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    • pp.1106-1113
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    • 2001
  • This paper presents experimental works on the ultrasonic influence during melting of ice and paraffin and compared the paraffin's result with ice's results. The experiments was carried out under two setting conditions.: 1) Heater without ultrasonic vibration, 2) heater with ultrasonic vibration. Experimental observations show that the ultrasonic vibration enhances significantly the phase-change process (melting) so that the melting time is reduced about 16∼25% compared to those of molting process without ultrasonics in the melting of both ice and paraffin. But the influence of ultrasonics was not significant to affect the reduction of the power consumption. In the case of paraffin, the reduction rate of power consumption was about 20%, but the reduction of the power consumption was increased about 0∼12%.

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