• 대한기계학회논문집 C: 기술과 교육
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• 제3권4호
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• pp.265-271
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• 2015

스마트폰을 비롯한 고성능 모바일 전자기기의 발전에 따라서 경박단소한 전자부품의 요구가 커지고 있으며 이를 위해서 새로운 패키징 방법이 탄생하고 있다. 이러한 새로운 패키징 공정에서 웨이퍼 본딩 공정이 많이 요구되고 있다. 웨이퍼 본딩에서 많이 활용되는 방법이 열 압착 방법으로 가열된 헤드로 웨이퍼에 압력을 가하여 본딩하는 방법이다. 열 압착 방법에서 요구되는 공정조건은 온도 균일성과 Uniform Press이다. 온도 균일성은 마이크로 히터와 열 해석을 통한 설계로 비교적 쉽게 요구조건을 만족 시킬 수 있지만 Uniform Press를 가공과 조립으로만 요구조건을 만족시키기 위해서는 매우 높은 정밀도가 요구된다. 열 압착 방법은 고온에서 동작되므로 열 변형에 대한 기계적인 오차를 고려하여 설계, 가공, 조립이 진행되어야하므로 많은 어려움이 따른다. 본 연구에서는 Air 스프링과 Metal Form의 자가 보정장치를 이용하여 가공, 조립, 열 변형으로 발생하는 기계적 오차를 보상하여 성능과 신뢰성을 향상시켰다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.290-290
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• 2009

Blu-ray Disk, the next generation optical information storing equipment used Blu-ray is the next generation leading storing equipment that has capacity is about from six times to thirty-five times bigger than the existing CDs, DVDs. Especially, we need elaborate optical pick-Up equipment to record and recognize detailed date. Moreover, Blu-ray disk has so narrow track-pitch so it is used high NA(Numerical Aperture) aspheric glass objective lens. In this research, we processed optical pick-up aspheric glass objective lens molding press core by parallel grinding method with ultra precision machining and mold core surface measured form accuracy(PV), surface roughness(Ra).

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.83-88
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• 2003

In this study, experiments were conducted with an ultra-precision machine, developed In domestic, to find the characteristics and the most suitable cutting conditions of ultra-precision machining. To maximize the performance of the machine, the machine was installed in a room that is protected from vibration and is maintained constant temperature and constant humidity. Selected work pieces are an aluminum-alloyed material, which has excellent corrosion resistance and has low deformation. The used tool is synthetic poly crystal diamond which has excellent abrasion resistance and has low affinity. Four types of tool nose radius were used such as 0, 0.1, 0.2 and 0.4mm. Machining is performed with cutting speed of 500, 800 and 1000m/min., feed rate of 0.005, 0.008, 0.010mm/rev. and cutting depth of 0.0005, 0.0025 and 0.005mm respectively which can generally be used in the field as a cutting condition. As a method of evaluation surface roughness was measured for each cutting condition and reciprocal characteristics are computed for each tool nose radius, cutting speed, feed rate and cutting depth. As a result the most suitable cutting condition and characteristics of ultra-precision machining were identified which can usefully be applied in the industrial field.

• 한국공작기계학회논문집
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• 제13권1호
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• pp.9-15
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• 2004

In this study, experiments were conducted with an ultra-precision machine, developed in domestic, to find the characteristics and the most suitable cutting conditions of ultra-precision machining. To maximize the performance of the machine, the machine was installed in a room that is protected from vibration and is maintained constant temperature and constant humidity. Selected work pieces are an aluminum-alloyed material, which has excellent corrosion resistance and has low deformation. The used tool is synthetic poly crystal diamond, which has excellent abrasion resistance and has low affinity. Four types of tool nose radius were used such as 0, 0.1, 0.2 and 0.4mm. Machining is performed with cutting speed of 500, 800 and 1000m/min., feed rate of 0.005, 0.008, 0.010mm/rev. and cutting depth of 0.0005, 0.0025 and 0.005mm respectively which can generally be used in the field as a cutting condition. As a method of evaluation, surface roughness was measured for each cutting condition, and reciprocal characteristics are computed for each tool nose radius, cutting speed, feed rate and cutting depth. As a result, the most suitable cutting condition and characteristics of ultra-precision machining were identified which can usefully be applied in the industrial field.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 기술교육전문연구회
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• pp.136-139
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• 2003

Thermal imaging system is electro-optical imaging device which can make visible the difference of infrared energy naturally emitted by objects. It is acquire the same images at any time of the day or night. There it has been readily available to the night observation such as fire control systems. In this study, we are manufacturing thermal image Al flat mirror. The surface roughness 3.539nm Ra and power 0.382 fringe(at 632.8nm), irregularity 0.835 fringe(at 632.8nm) for form waviness of thermal image Al flat mirror are very satisfied. The results will be reflected for development of the ultra precision application. And a brief review of Ultra-precision system in the field of Ultra-precision at Korea photonics technology institute (KOPTI) is present in this paper.

• Current Optics and Photonics
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• 제2권3호
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• pp.280-285
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• 2018

A new method to design a see-through off-axis head-mounted-display (OA-HMD) optical system with an ellipsoidal surface is proposed, in which a tilted ellipsoidal surface is used as the combiner, which yields the benefits of easier fabrication and testing compared to a freeform surface. Moreover, we realize a coaxial structure in the relay lens group, which is simple and has looser tolerance requirements, thus making assembly easier. The OA-HMD optical system we realize has a simple structure and consists of a combiner and 7 pieces of coaxial relay lenses. It has a $48^{\circ}{\times}36^{\circ}$ field of view (FOV) and 12-mm exit pupil diameter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국정밀공학회지
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• 제33권11호
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• pp.893-898
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• 2016

Plastic array lens are cheap to manufacture; however, plastic is not resistant to high temperatures and moisture. Optical glass represents a better solution but is a more-expensive alternative. Glass array lens can be produced using lithography or precision-molding techniques. The lithography process is commonly used, for instance, in the semiconductor industry; however, the manufacturing costs are high, the processing time is quite long, and spherical aberration is a problem. To obtain high-order aspherical shapes, mold-core manufacturing is conducted through ultra-precision grinding machining. In this paper, a $4{\times}1$ mold core was manufactured using an ultra-precision machine with a jig for the injection molding of an aspherical array lens. The machined mold core was measured using the Form TalySurf PGI 2+ contact-stylus profilometer. The measurement data of the mold core are suitable for the design criterion of below 0.5 um.